High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

AHC System Series MA

Without D-sub connector D-sub connector entry With D-sub connector With robot cable Without D-sub connector D-sub connector entry With D-sub connector With robot cable Nil Robot adapter Applicable shaft diameter 8 10 11 AHC unit 14 15 20 24 25 M3 M5 Tool adapter Port MA310 1 MA320 1 MA210 Electric specifications Without D-sub connector Without D-sub connector D-sub connector entry With D-sub

Lubricator Series AL10 to 60

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Speed Controller: Standard Type Series AS In-line Type

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

d L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

CE

D-F7PV M9NAV 2 D-M9NAV A79W D-A79W M9PAV D-M9PAV M9BAV D-M9BAV F7BA D-F7BA F7BAV D-F7BAV D-F79F 2 F79F F7NT D-F7NT 223 *1 AC100240V D DC24V C 05 5m 10 10m 15 15m 20 20m RS-232C B RS-232C + BCD *1)() C ()CE1 NPN PNP 2-3 CE1 CEU5 CE1 CEU5 CE1-R 23m 9 CE1 CE1-R*CE1 () () CE1 CE1-RC C () CE1 CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3. 3-1 1.5MPa 1.0MPa 12 2063

Digital Flow Switch (Integrated display type) ( compatible)

Min. to Max. a to b c to d PF3W7 oC Common 0 to 100 -10 to 110 0 to 1000 -100 to 1100 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

3

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

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d L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller Series PSE300 Internal Circuit PSE30 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE33 PNP open collector output (2 outputs), Max. 80 mA,

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

plated M J NBR, Stainless steel 304 D I G F E C Connection thread B A Barb One-touch: M-32F-2, M-04F-2 Applicable tubing (mm) Weight (g) A B C D E M1 M2 Model (O.D. / I.D.)

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.