SMC Corporation of America
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Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/2, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Nylon Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

(page 79) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".

(page 75) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".

(Page 84) 5 R/W Line name 5th letter U8 0 Y 7seg 2420 0x0974 6 R/W Line name 6th letter U8 0 Y 11seg 7 R/W Line name 7th letter U8 0 Y 7seg 8 R/W Line name 8th letter U8 0 Y 7seg 9 R/W Line name 9th letter U8 0 Y 7seg OUT output test Communication Communication OUT output test U8 N 0: Normal output 1: Fixed output The PD becomes 1 when a fixed output has been received 7000 0x1B58 0 W Refer

2 R/W5 PinCode 0x0 ~ 0x03E7 (Security code) Y U16 (0) (0 ~ 999) Process data 0x1F40 0x1F41 0x1F42 0x1F43 Conversion formula Inclination a 0 R N F32 (8000) (8001) (8002) (8003) Refer to table "Inclination and intercept to the unit specification".

8 D side U side Station 7 6 5 4 3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03 3/8 04 1/2 * R thread type: With sealant G thread type: Without sealant Valve side Cylinder side 04 F 10 S AS4201 X785 Pilot port Thread type Seal method Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) * R thread type: With sealant G thread type: Without sealant Port size Cylinder side

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P