Vacuum Equipment capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.
Model l/min (ANR) IDFS11E 825 IDFS8E 600 IDFS6E 370 IDUS6E 370 IDUS4E 250 IDUS3E 155 Operating air pressure Air discharge if no drainage Condition Inlet air pressure: 0.7MPa Inlet air temperature: 35C saturation Ambient temperature: 32C Outlet air temperature: 10C or less 6 l (ANR) each time 0.3MPa 10 l (ANR each time 0.5MPa 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min.
If the fluid is left inside, an accident and damage can result during transportation. 0.04 0.04 Warning If instructions are not followed there is a possibility of serious injury or loss of life. 0.02 0.02 0.00 0.00 0 5 10 15 20 Danger In extreme conditions, there is a possibility of serious injury or loss of life. 0 5 10 15 20 3.3.1 Cooling Capacity Facility water flow rate L/min Facility
Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (
s t o p p e r I n s t a l l p o s i t i o n o f e x t e r n a l s t o p p e r C auti on on usi ng exte rnal stoppe r R o t a r y a c t u a t o r w i t h A u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l
EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.
Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 0.6 0 0.2 2 0 2 Differential pressure [kPa] Differential pressure [kPa] Dimensions 2 x 3.5 through Indicator light 24.3 37 27 4.4 4.8 10.7 7.3 25 37 9 3000 15 11.7 10.4 2 x M3 x 0.5 depth 4 With bracket A 37 27 25 38.5 40.9 4.2 11.6 69.5 68 7 20 1.6 A View Bracket 836 Pressure Sensor For General Fluids Series
L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16
(mm) 2 Effective area (mm2) Weight (g) D L Q Model D KJT02-00 6 10 4.9 8.8 0.9 1.7 Q Q 3.2 5.2 Q M Q L D D M M L L Male branch tee: KJY T H A Applicable tubing O.D.
Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer
14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA
140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch
min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min 50 to 250 L/min 0 to 70 oC (No Fluid temperature 0 to 90 oC (No freezing and condensation) freezing and condensation) Accuracy 3% F.S. max.
Symbol Temperature oC oC oF oF Accumulated flow L gal gal L Instantaneous flow rate L/min gal/min gal/min L/min M G F J External input Note 1) Note 2) (NPN) (PNP) (Analog 1 to 5 V) (Analog 4 to 20 mA) (Analog 1 to 5 V) (Analog 4 to 20 mA) Note 2) With temperature sensor Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan.
Without auto switch L 16 60 5 L CVJ5 L 5 L J79W 16 60 CDVJ5 With auto switch Number of auto switches Rod extended/retracted when energized Built-in magnet 2 pcs. 1 pc. n pcs.
CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when
Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !
-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 6 4
Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D-8G&2 D6A&1 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .