Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size/Valve Type: 4 (Size: 10A, 15A; Valve Type: N.C.), Body/Port/Orifice: J (Body Material: Stainless Steel; Port Size: 3/8, Orifice Dia.: 15), Voltage/Electrical Entry: J (110VAC; DIN Terminal w/Surge Voltage Suppressor)

Series: NCA1 (Standard), Mounting: J (MT2, Head trunnion), Bore Size: 150 (1 1/2"), Stroke: 0150 (1 1/2"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 200 (2"), Stroke: 0400 (4"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCA1 (Standard), Mounting: J (MT2, Head trunnion), Bore Size: 325 (3 1/4"), Stroke: 2800 (28"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 325 (3 1/4"), Stroke: 0300 (3"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 325 (3 1/4"), Stroke: 0400 (4"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 325 (3 1/4"), Stroke: 0700 (7"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 400 (4"), Stroke: 0700 (7"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCDA1 (Standard w/ Magnet), Mounting: J (MT2, Head trunnion), Bore Size: 150 (1 1/2"), Stroke: 0700 (7"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

,

Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J

Copper-free Actuators

piston rod 1.3-42 20-CJ2Z Built-in speed controller 1.3-56 20-CJ2R Direct mount Free mount cylinder Series C(D)U 2.1-4 20-CU Standard SCUl 2.1-24 20-CUK Non-rotating rod Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

I

Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h dNrr,'J]

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

.) + Switch unit Option With foot brackets (L) Mounting Auto switch units can be retrofitted even when equipped with foot brackets Dual Porting Options: Top or Side Locations Long side round/ Short side square J Positions can be freely selected based on the application. Top ports can be used even with auto switches.

Clean Rodless Cylinder Series CYP

Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5

Air Cylinder MGQ Series Compact Guide Cylinder

150'25 consult laclory when the desrd stroke s grealer lhan lhe slandard strcke l MPa='l0.20kg cm'z Specif rcations Operation Double acting 1.sN4Pa(1 5.3kgf/cm'; 217PSl) Prool pressure 1.oMPa(1 0.2kgtcm'; 145PSl) o.rzuP"f l zr,(st/"|.t"J tPSr) Max. operating pressure : 012, d,16 Min. operating pressure s20-0100 0.1 lvlPa(1 .okgflcm'i l4PSl) -10-+60'C (14-140'F) Amuent and Iluid 50-500mm/s

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J