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Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

D-Y69 D-Y7P 7 - 1. 2. 1. 2. 3. 8 - 3. 4. 10 2 16 2 1 <> : AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 3. 4. 9 - 1.( ) 2. 5 3. 4. oC 5 2-5. 1.

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

IR : Combination not available : Available only with NPT thread : Combination available : Varies depending on the model Accessory/Optional Specifications Combinations VEX Applicable micro mist separator Optional specifications Accessory Symbol Combination AFD20 B C D 2 6 8 C J R Z W AFD30 to 40 AMR Accessory/Optional specifications B C D Accessory Optional specifications With bracket ITV

(The SI unit type is provided for use in Japan.) : Combination available : Varies depending on the model : Combination not available : Available only with NPT thread Accessory/Optional Specifications Combinations Applicable mist separator Optional specifications Accessory Combination Symbol AFM20 B C D 2 6 8 C J R Z W AFM30 to 40 Accessory/Optional specifications B C D Accessory With bracket

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Please keep this manual handy for future reference. 4 x M5 : Tightening torque: 1.5 Nm Ethernet communication cable COM A COM B COM C COM D 685 Display Description The power supply for input and control is OFF LED is OFF Operating normally Green LED is ON MS To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or

Rated current 6 Branch port C (COM A) 48 52 7 Branch port D (COM D) After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

M6x23 : : M3X7 D-M9P-5 JMHZ2-16D M-5ALHU-2 2 KQ2S04-M5N 3 V114-5LU ASN2-M5-X937 3x6 ISO9409-1 M4x25 6x10 M6x10 M8 8 () M6x10 ISO9409-1 6x10 5 - 3-1. JMHZ2-16D-X7400B-ASSISTA(-P) mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 680 D-M9(N/P)-5 ISO9409-1-31.5-4-M5 (www.smcworld.com)JMHZ2 Series P .15 M12 8 6 - 3-2. 2 1 F 7 - 3-3.

Auto switch Auto Switch Specifications D-M9-5(With indicator light) Auto switch model D-M9N-5 D-M9P-5 Electrical entry direction In-line Wiring 3-wire Output NPN type PNP type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at

Push-turn slotted locking type [Type D] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated the same way as the non-locking type. Locked position When operating the locking type D with a screw driver, turn it gently using a watchmakers screw driver.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

1 8, 1 4 VT VP VG Bracket Bracket 2-M5, Depth 7 For mounting 2-M5, Depth 7 For mounting VP S070 VQ ( ): DC [ ]: AC, with indicator light VKF VQZ Base mounted VS3110-G VS3110-D VZ VS 2-4.5 VFN Mounting hole 87.5 (111.5) [90.5] 2-4.5 Mounting hole Manual override Manual override 87.5 (111.5) [90.5] 300 (Lead wire length) G 1/2 (Cable 8 to 10) 3-Rc , 1 4 3 8 3-Rc , 1 4 3 8 ( ): DC [ ]: AC,

Applicable tubing O.D. d ASS Model AS231FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 31.8 ASR Applicable tubing O.D. d AS231FE-01-06SK 12 R 1/8 12 13.5 22.9 10.9 14 26.9 6 11.6 27 37.2 48.9 49.9 44.9 14.2 53.9 (Hexagon width across flats) AS231FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 41.7 ASF (Hexagon width across flats) AS231FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 40.1 AS231FE-02

Auto switch Auto Switch Specifications D-M9(With indicator light) Auto switch model D-M9N D-M9P Electrical entry direction In-line Wiring 3-wire Output NPN type PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage DC28V or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

thread) (5.4) 12 (35) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port 26.2 2 x 3.2 (For mounting) 21.5 NC 2A 3.4 (1.6) 20.4 16 65.2 (9) 2 x 3.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35)