Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Filter Regulator AW30, 40

-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Free flow Controlled flow Weight (kg) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio AS420-02 AS420-03 AS420-04 AS500-06 AS600-10 AS800-12 AS900-14 AS900-20 1/4 3/8 1/2 3/4 1 1 1 2 10 13.3 18.6 22.5 47 107 132 169 3,600 4,800 6,700 8,100 16,900 38,500 47,500 60,800 6.9

ZSE5/ISE5

-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

•

Repet~ ion accuracy (standard) (reversed) 12 24VDC (Ripple 10% max.) Power supply Peak I Bottom hold function ConsumptIOn current 45mA max. Fau ~ display Indication: Red LED f lashes! LCD error code displayed .

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN

FGX-OMZ0008

300 X40 0.4m 99.9% Element category Symbol Element J HEPO D Membrane Port size Port size Symbol (Rc) 03 3/8 04 1/2 06 3/4 8/12 FGX-OMZ0008 4.

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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb

,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

AW30: G43-10-01-X3 or AW40: G43-10-02-X3 is included.

How to Order E210/310/410 Series Modular Adapter

Modular Adapter How to Order E210/310/410 Series AC-A AF-A AF-A E310 03 U AR-A Size AL-A Piping port size 210 310 410 Size 310 Port size Uni thread AW-A Symbol 410 210 01 02 03 04 1/8 1/4 3/8 1/2 AC-B Thread AF-A Uni thread U AF-A AR -A -B Specifications AL-A Model E210 E310 E410 AW -A -B Port size 3/8 1/4 1/4 1/4 3/8 1/2 1/8 AW Piping I.D. 10 8 8 8 10 12 6 AG Fluid Air Ambient and fluid

ACG

Note 10) For thread type NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) (1) (3) (2) (1) (2) Note 1) Wall mount is not available for size 20 regulator with downward facing handle in B combination. Contact SMC when wall mount is needed.

VEX1

D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal 1 4 1 2 D DIN terminal 1 2 G Grommet (Lead wire length 300 mm) Grommet (Lead wire length 600 mm) DIN terminal DIN terminal (Without connector

VXA21/22

VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 3 mm 4.5 mm 6 mm 8 mm 10 mm 2 3 4 5 6 VX2 VX Refer to the table (1) given below for availability. Port size VX3 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.) / Single unit Normally open (N.O.) / Single unit VXA 3 8 1 2 Refer to the table (1) given below for availability.

CG5-X6011

CD1 CD2 CL CP 0.500 0 -.002 0.106 2.28 1.94 NCDP-150-SUS 0.750 0 -.002 0.140 3.10 2.72 NCDP-325-SUS Note: Cotter Pins are included. 7 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard Noblesville, IN 46060, U.S.A.