ZP Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5
For details of each setting, refer to page 22 to 69 of this manual. Do not touch the LCD during operation. The display can vary due to static electricity. Maintenance Turn OFF the power supply before maintenance. There is a risk of unexpected malfunction. Perform regular maintenance and inspections. There is a risk of unexpected malfunction.
6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT2 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 6-25 LQ1-6N25 LQ1-6B25 LQ1T61-TT3 6 6-25 LQ1-6N25 LQ1-6B25 Tubing extensions 25 x 22 LQ1T61-TT4 6 Tubing extensions 25 x 22 6-25 LQ1-6N25 LQ1-6B25 T3 type T4 type Inch size C side Part no.
Low temperature limit of temperature range monitoring function 22. Press the [] key. Displays Low temperature limit of temperature range monitoring function setting screen.
Various units 19 5.1 Switch block unit 20 5.2 Vertical auto switch unit 20 Part number for Auto switch unit 22 How to mount Auto switch unit 22 5.3 Angle adjustment unit 22 Part number for Angle adjustment unit 25 Mounting of angle adjustment unit 25 5.4 Joint unit for combining switch unit and angle adjusting unit 27 6.
/ [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5 17 LEY 32 M141.5 65.0 20.5 22 [mm] [mm] [mm] LEY 16 13 5 5 LEY 25 22 8 8 LEY 32 22 8 8 / [Nm] L[mm] LEY 16 M40.7 1.5 5.5 LEY 25 M50.8 3.0 6.5 LEY 32 M61.0 5.2 8.8 / [Nm] L[mm] LEYD LEY 16 M40.7 1.5 7 LEY 25 M50.8 3.0 8 LEY 32 M61.0 5.2 10 -44- LEYG / [Nm] [mm] M L M50.8 3.0 8 LEYG16 4 M L M61.0 5.2 11 LEYG25
Scket width across flats Rod end nut Max.thread Model Bolt tightening length [mm] torque [Nm] [mm] LEY25 M14x1.5 50 20.5 17 LEY32 M14x1.5 50 20.5 22 Soke LEY63 M18x1.5 97 26 36 Mounting / Body bottom tapped style (When Body bottom tappde is selected Rod end nut thread Width Model depth of Length [mm] across flats bracket[mm] [mm] LEY25 22 8 8 or more Thread depth of bracket LEY32 22 8 8 or
Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40
22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port)
Lead wire color Dot marking 18 19 14 15 Pink 16 17 20 21 22 Pink 23 24 25 13 Terminal no.
Applicable Magnetic Field Resistant Auto Switches (Refer to page 21 and 22 for detailed auto switch specifications.)
(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5
VX Manifold Series VVXA21/22 VNl Normally Closed (N.C.), Normally Open (N.O.) VQ Refer to p.4.1-64, 4.1-65 for specifications and models.
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle
Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.
VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98
22 24.5 24.5 40 48 62 66 1/4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5
operating conditions Compressed air 0.3 to 0.85 0.3 to 1.0 5 to 55 5 to 55 5 to 50 5 to 50 Ambient temperature (oC) Note 1) Standard Outlet air atmospheric pressure dew point (oC) performance 15 Inlet air flow rate (L/min [ANR]) Note 2) 28 25 56 50 111 100 222 200 329 300 550 500 665 600 830 750 1110 1000 Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) 3 6 11 22