PEAPP Series

NF-36-03-C02-11

Wireless System

EX600-ZT1 y Communication Cable with Connector/Communication Connector Cable with M12 RJ-45 connector EX9-AC 020 EN-PSRJ (Plug/RJ-45 connector) 14.8 Cable length (L) M12 RJ-45 6.4 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm (47.3) (44) L Cable core wire colors 1 2 1 2 3 4 5 6 7 8 Terminal no. Terminal no.

RSH

9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (#1+#5) : RSH Bore size -lll Basic w/locking mechanism w/cancel cap w/lever detection switch w/locking mechanism + cancel cap w/locking mechanism + lever detection switch w/cancel cap + lever detection

JXCx-OMT0032CN

ID 2 3 3 2 4 2147483647 0.01mm 4 1 5 0 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 3 ID1 11 2 4 2147483647 0.01mm 12 1 13 0 14 0255 15 0255 4 16 0255 17 0255 18 IF(ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 33 - / Bit No.

SI unit for EtherNet/IP TM

Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 5) M and MO type connectors cannot be selected for the model with the pressure sensor or the pressure switch for vacuum. 11 - Doc. no.

High Vacuum L Type Valve

Solenoid valve (11) SYJ319Plate assembly (12) XL1AV16-90-2 63 80 Valve size Description Part indication No. Solenoid valve (11) SYJ519Plate assembly (12) XLAV63-90-1 Note 1) The at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications. For details about selection symbols, refer to the Web Catalog.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw.

MHL2

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

Rotary Table/Vane Style Series MSU

MSUA3 MSUA3-S/SE 8 x M4 x 0.7 depth 7 C 58 36 44 B 27 30 4 x M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (Positioning pin hole) 22.5 29 2.5 3 3 x 3H9 depth 3 +0.025 0 2 x 4.5 through ( A , B , C ) 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2 x 4.5 through 6 2 x M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5

VXA21/22

6 170 Construction/Components 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 0.61 4.5 11 1 4 250 Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

10

For with cap Applicable absorber B C h1 h2 MM d f h M6 x 0.75 MM B 2 C 8 For basic type RBC08S RBC10S RBC14S RBC20S RBC27S RJ06J RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S RJ08 12 13.9 6.5 23 M8 x 1.0 9 15 9.2 RJ10 M8 x 1.0 14 16.2 8 23 M10 x 1.0 11 15 4 12 13.9 RJ14 M10 x 1.0 19 21.9 11 31 M14 x 1.5 15 20 4 14 16.2 M14 x 1.5 RJ2015 27 31.2 16 40 M20 x 1.5 23 25 6 19 21.9

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Lubricator Series AL10 to 60

H 22 23 26 25 35 35 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

-X5 -X7 -X12 -X39 -X41 -X50 -X53 -X63 -X64 -X65 -X77A -X77B -X78A -X78B -X79 MHKL2-12D 12 11 9 20 104 Heat resistance (100C) Double acting Single acting Fluororubber seal MHY MHKL2-16D 16 14 14.6 28.6 164 Closing direction spring assist MHKL2-20D 20 18 16 34 312 MHW Opening direction spring assist With grease needle MHKL2-25D 25 22 19 41 562 -X Switch groove (Both-side type) 90 12 9 11 9

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA3 MSUA3-S, SE Scale: 70% 8-M4 x 0.7 depth 7 C 58 B 36 44 27 30 4-M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8

Modular Type Lubricator Series AL

11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220

Digital Gap Checker

N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

AZ1000

to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11