Clean Regulator/Fluororesin Type

1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method

SYJ300-OMU0003

-P.19 SYJ700-P.21 D 0.1Nm [E ] (D,E) 9 No.SYJ300-OMU0003 SYJ Series 300mm Assy DCSY100-30-4AAC100VSY100-30-1AAC200VSY100-30-2AACSY100-30-3ADC SY100-30-A 2 300mm 6 600mm 10 1000mm 3.23.7mm 15 1500mm () 20 2000mm 25 2500mm 30 3000mm Assy {}2000mm 50 5000mm 0.2-0.33mm 2 1.7mm DC AC SYJ312-5LO-M3 SYJ312-1LO-M3 SY100-30-4A-20 SY100-30-1A-20 (+-) (1mm) 10 No.SYJ300-OMU0003 DIN

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

MLGC

6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 21.5 (30.5) 19.5 (28.5) 40 35 37.5 38 8.5 12 10 15.5 14.5 11.5 13.5 Values in parentheses are for long stroke

Refrigerated Air Dryer

Breaker capacity Sensitivity current Model Voltage Maximum operating pressure: 1.6 MPa (IDFA100F to 150F: 1.0 MPa) IDFA4E-23, IDFA6E-23 IDFA8E-23, IDFA11E-23 5 A The timer-type solenoid valve actuates once (for 0.5 s) every 30 s. Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Multistage Ejector (N)ZL Series

30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

ZSE40/ISE40

Rc 1/8 12 16-2-23 10 Series ZSE40/ISE40 Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 600 (3000) Lead wire length 3.5 ForM5

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

MLU

MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.

IDX-OM-W023

(5) (22)(27) () () () 2) 3) 9-4 IDU Series 9-3 9 2 IDX-OM-W023 10 M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5

Air cylinder (Series compatible with secondary batteries)

55 60 D-M9V-900 1 D-M9WV-900 55 30 (n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4

IDX-OM-W014

-1 10 1 IDX-OM-W014 10 M 10-2 ADM200 IDU3E6E-10-M IDU3E6E-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

-fl Seies

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

rep-modular-e

ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.