53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

SFOD-OMT0009CN

51 No.SFOD-OMT0009CN-B 7.4 9 512 20482048 ()() Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 1 INC 500 800.00 1000 1000 1 0 0 10 2 INC 500 900.00 1000 1000 1 0 0 10 1 3 INC 500 900.00 1000 1000 1 0 0 10 4 INC 500

3

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion

Cylinder with Lock Series CLS

10 10 10 10 RLQ D-A59W 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline

Air Slide Table Series MXJ

MXJ4 MXJ4L 4.5 MXJ6 MXJ6L 6 MXJ8 MXJ8L 8 60 500 50 Theoretical output (N) MXQ / MXS 40 MXQ 100 Height (mm) 30 50 20 MXJ 10 MXJ 10 50 5 20 30 150 Stroke (mm) 0 1 10 100 1000 Allowable moment (Nm) Operating pressure: 0.5 MPa when operating direction is OUT.

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Weight Allowable Moment MY3A, MY3B/M1 MY3A, MY3B/m1 MY3A, MY3B/M2 MY3A, MY3B/M3 30 20 50 40 30 200 100 50 100 20 40 30 10 MY3A 3B63 MY3A 3B63 50 40 30 10 20 5 4 3 2 MY3A 3B63 10 5 4 3 MY3A 3B63 20 MY3A 3B40 MY3A 3B40 MY3A 3B40 Load weight kg 5 4 3 Moment Nm Moment Nm Moment Nm 1 2 10 MY3A 3B40 0.5 0.4 0.3 0.2 1 2 MY3A 3B25 MY3A 3B25 5 4 3 MY3A 3B25 MY3A 3B25 0.5 0.4 0.3 1

Digital Flow Switch ( compatible)

Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Select from 2 minutes or 5 minutes Rated pressure range 0 to 0.8 MPa Pressure Proof pressure 1.2 MPa Pressure loss Refer to the pressure loss graph Pressure characteristics 2 5%F.S. (0 to 0.8 MPa, 0.6 MPa standard) voltage Used as switch output device 12 to 24 VDC 10%

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material

MHY2/MHW2

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

VCL

19 0.80 5 0.2 33 1.4 7 0.1 50 2.1 10 2.0 8.4 0.35 3 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 1/4 ( 8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1.1 14 0.60 4 2.0 0.7 20 0.85 5 VCL4 4 0.3 33 1.4 7 0.12 50 2.1 10 Note 1) Refer to page 333 in model selection regarding port size and orifice diameter combinations.

CRBU

CRA1 CRQ MRQ MSQ MSUB L1 (mm) (mm) (mm) Size 10 15 20 30 X Size 10 15 20 30 L1 Y Size 10 15 20 30 L1 L2max X 5 (8 Y) to (Y to 1) 6 (9 Y) to (Y to 1.5) 7 (10 Y) to (Y to 1.5) 8 (13 Y) to (Y to 2) 19 (14 X) to (X 1) 10 (18 X) to (X 1.5) 10 (20 X) to (X 1.5) 12 (22 X) to (X 2) 3 to 8 3 to 9 3 to 10 5 to 13 3 to 14 3 to 18 3 to 20 5 to 22 3 to 14 5.5 to 18 7 to 20 7 to 22 9