FHM

0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the

Exhaust Cleaner for Vacuum Pump AMV Series

amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel

WRF100

10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115 50 4 x 14 through 320 330 0.05 (mm) A B C 200 Arm type S200 S240

Safety Instructions

Maximum Operating Pressure How to Order Metric size TD0425 10 2.0 1.8 TD0425 Length per roll Max. operating pressure (MPa) 1.6 Symbol 10 20 Length Tubing model TD0604 1.4 10 m roll 1.2 20 m roll Fluorine ion elution (g/g) TD0806/TD1075/TD1209 Note 4) 1.0 Kind Fluorine ion 0.8 Amount of elution 0.7 0.6 Cut the fluoropolymer tube into 15 g and clean it with pure water.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

MONOSASHI-KUN

Cylinder Specifications 10 3-2. Sensor Specifications 10 3-3. Allowable Kinetic Energy 11 3-3-1. Allowable Kinetic Energy 11 3-3-2. Mass of Cylinder Movable Parts11 3-3-3. Load mass and Piston Speed 11 4. Wiring 4-1. Connector Wiring Table 12 4-2. Wiring for Counter 12 4-3. Noise countermeasures 12 5. Structure and Measuring Principle 5-1. Structure 13 5-2.

CDQ2BP series

"ALrto switch detail: see pgs. 10-11.

AP500

0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40

Compact Cylinder High Magnetic Field Design CDQ2BP Series

"ALrto switch detail: see pgs. 10-11.

Electric Actuators

Direct acting guide 3 0.03 Ball screw 100 Matsushita Electric Industrial Co., Ltd. 50 Series LXP 6 100 Ball bushing guide Mitsubishi Electric Corporation Ball screw 0.03 50 5 Yaskawa Electric Corporation 100 Series LXS 50 10 Note) Series LXF is only compatible with motors manufactured by Mitsubishi Electric Corporation.

Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Stroke adjusting range (One side) MGZ 0 to 15 mm 0 to 10 mm [Built-in adjusting bolts (2 pcs.)]

Thermo-chiller

(No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Bore Size: 40mm, Port Thread: Rc, Stroke: 50mm

Bore Size: 40mm, Port Thread: Rc, Stroke: 30mm

Bore Size: 40mm, Port Thread: Rc, Stroke: 100mm

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.1～1, Cushion: Rubber bumper at both ends, Port thread type: Rc

Bore Size: 40mm, Port Thread: Rc, Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -