Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

High Vacuum Angle Valve, XL Series

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CRQ2

I = m + mL kgm 2 r Find the actual moment of inertia I.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = m + mL kgm 2 r Find the actual moment of inertia I.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Air Cylinder NCM Series Stainless Steel Cylinders

L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster 52 Air Slide Table Low Thrust with High Rigidity Type 6, 8, 12, 16, 20 MXQB Series RoHS How to Order B 30 ZA MXQ 12 M9BW q w e r t y u w Body option q Bore size e Standard stroke [mm] Standard type Symmetric type B BL 6 10, 20, 30, 40, 50*, 75* Port Port Switch mounting groove Switch mounting groove 8 10, 20, 30, 40, 50, 75*, 100

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Air Cylinder NCQ7 Series Compact Cylinder

D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W. D-F7BWV D-F7PW D-F79W. D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL o oiagnoslic ouipui OUT 2 o Series NCDQT Auta-Switch / Operating Range D-A72.

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_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.