Precision Cylinder Series MTS

Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

PFxx-OMX0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

AR20-B to AR60-B

C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2

q"s

P S I : 0 . 1 N d r a ' . k P a : 1 Ambient and lluid temoeralure 0 to 50'C {with no condensation) Enclosure tP65 Hated pressure I Weight tw10trn ADorox. 250 a {without options) tw20t Aoorox. 350 q (without options) tws0 Aoprox. 645 q (without options) R = ='5 Note 1) Please refer to graph 1, relation lo lhe ditferences belween lhe sel pressure and input.

VFR5000 Series

Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM. Note 3) Station numbers are started from D side although connector is mounted on D or U Side. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

AMF

Packing NBR O.D.112 X I.D.90 X T3 1 pc. O.D.112 X I.D.90 X T3 3 pcs. t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Series 10-, 21- AF-A Air Filter

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

VFR5000-OMN0001

P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax:

HEC-OM-Y008

OUT3 OUT4 1 or 2 1: 1 bit, 2: 2 bit Temp.control Turn ON Main power switch again of the piping (e.g. no tight bends or crushed pipes). Normal pump and fan : Temperature control Control Mode status RYD 4) Confirm there is no abnormal sound, smell or heating from the product. 2nd digit : Parity check stop and pump/fan operation enabled Setting DI2 Sets control mode.

ZP

lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B Model d H B C NTJ-015A 9.2 8 4 M8 x 1 M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

AV2000/3000/4000/5000

Grommet type only) With light/surge voltage suppressor (Not possible with grommet type) Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G: Grommet Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240VAC (50/60 Hz) Other D: Type

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Multi-channel Digital Sensor Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: