5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type VVFS5000-3A-1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly 11 End plate (D side) assembly Plug-in type Non plug-in type VVFS5000-3A-2 12 1217 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Model Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1

SZ3000

Stations Stations Scale: 37% [With external pilot] 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 R 3 B 2 PE X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5

AC Servo Motor Driver (SSCNET /H Type)

28.1 Linear encoder Environment error EDB 2A.1 Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A.4 Linear encoder error 1-4 EDB 2A Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error

SJ3A6

2!

Table of Contents

0 @6 q i r 2a 3a @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 !8 @2 !9 With switch rail Component Parts No. Description Note Material No.

VFR

2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

0.4

SV SYJ (L4) (5.25) (L3) SZ L1 L2 VF 100 6.5 34.5 P = 16 1 0.9 Indicator light Manual override VP4 13.2 (12) VQ 1/2 VQ 1/2 2B 2A 2 3B 3A 3 4B 4A 4 1B 1A 1 VQ 4/5 (35) (5.5) 31.6 6.2 120 <126.9> 125 49 VQC 1/2 80 46.2 10.6 4 VQC 4/5 VQZ SQ 78.2 4 x M5 mounting hole VFS n Stations 8 7 6 5 4 3 2 1 D side U side VFR DIN rail clamp screw C10 [3(R) EXH port] C10: 10 One-touch fitting 2 x G 3/4 Electrical

0.4

(A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2

MY1

2 2 2 2 4 Note) Two types of dust seal band are available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

VZ1000-11-1-l EX180-ll SJ3000-53-2A End block assembly 2 For U side Refer to the connector block assembly part no. shown below.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

VZ1000

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Manifold Specifications

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

125

Manifold base Port 2(A) side Port 2(A) side Internal pilot Common external pilot + + + + Blanking plate assembly VVEX2-2 (Common external pilot) Exhaust from both ends when there are 5 stations or more. 2 x M5 Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P):