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Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

(mm) l : Tube piping length (mm) Vt = d2l 4 20 1 30 0.5 40 0.25 Tube length means the length from the switch valve (e.g. solenoid valve) to the actuator.

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

(per 1 m3) The amount of water at the intersection C the amount of water at the intersection H = the amount of condensed water 18.2 3.0 = 15.2 g/m3 Dew Point Conversion Chart 60 50 40 30 20 Pressure dew point (C) B A 10 1.5 MPa 1.3 MPa 1.1 MPa 0.9 MPa 0.7 MPa 0.5 MPa 0.3 MPa 0.1 MPa Atmospheric pressure 0 -10 -20 -30 -40 -50 C -60 -50 -60 -20 -10 0 10 20 30 -40 -30 Atmospheric pressure

-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5 x 0.8, R threads after

-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Specifications Series JSXFAE/F 06 10 14 Orifice diameter [mm] 32 40 50 Port size 3/4 1 1 1/2 Fluid Air Pilot valve Exhaust Pilot piping Orifice diameter: 5 mm or larger Min. operating pressure differential [MPa] 0.1 JSXFA Pilot port Max. operating pressure differential [MPa] 0.9 Max. system pressure [MPa] 0.9 Fluid temperature [C] 40*1 to 60 Ambient temperature [C] 40 to 60 Weight [g] Compression

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RU printing RU 8600SZ Printed in Japan. D-G

50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without