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d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity. The VQ20/30's long life, high speed coil (up to 20 million cycles at 100cps for pneumatic use) along with its all plastic construction, make it an excellent choice for those who want high performance at a lower cost.Manifold for VQ20/30 pilot operated valve

150 E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF), Exhaust Cleaner Mounting Direction: CD (D Side, D Side Mounting)

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number), DIN Rail

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number), DIN

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)