JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.

KS/KX

6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation.

Series 11-MXJ Air Slide Table

Z ZZ H G 3 +0.03 0 depth 2.5 GA A 15 3.3 3.5 A 5.8 4 x M4 x 0.7 3 +0.05 0 depth 2.5 3 3.5 A-A Model G GA H I J K M Z ZZ 11-MXJ6-5 11-MXJ6-10 11-MXJ6-15 11 17 17 5 17 27.5 42.5 37 43 11 17 17 5 17 27.5 42.5 37 43 Other dimensions are the same as standard model (Series MXJ). 13 22 20 7 20 31.5 47.5 42 48 828 Air Slide Table 11-MXJ Dimensions Basic (Without switch rail) 11-MXJ8-N 12 (Plugged

HRX-OM-M005

Fitting screw size: M2.60.45 P3 (D-sub9 female receptacle) Cap P2 (CH2 D-sub25 female receptacle) P1 (CH1 D-sub25 female receptacle) Power cable Serial RS-485 or RS-232C cable Ferrite core(accessory) Rear CH2 contact signal / Analog cable CH1 contact signal / Analog cable Figure 3-8 Power Cable Insertion and Communication Cable Connection Do not drop a screw or washer in the electrical unit

Compact Vacuum Unit

(Refer to page 17 for details.)

K35-OMW0030

Specification . 17 4-1. General Specification . 17 4-2. Electrical Specifications . 19 4-3. Air Circuit . 19 4-4. Dimensions. 20 4-5. Construction . 25 5. Installation / Wiring . 26 5-1. Installation . 26 5-2. Electrical Wiring Diagram . 27 6. Setting . 29 6-1. Piston Rod Movement Direction (DIP Switch No. 1) . 30 6-2. Bore size (DIP Switch No. 2, No. 3, No. 4) . 30 6-3.

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

MY1

Black [White] D-Y69A, D-Y7PV, D-Y69B DC() Blue [Black] M2.5 x 4 Slotted set screw D-Y59B, D-Y69B Indicator light 2.5 OUT(+) Brown [Red] SMC 6.2 5 Main circuit of switch 27.3 3.4 OUT() Blue [Black] 8.5 12.5 Most sensitive position 17 Solid State Switches with 2-Color Display: Direct Mounting Type D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) Specifications Grommet D-Y7W, D-Y7WV (with indicator light )

Air Cylinder

D-J51: 5ms or less Lead Wire Length D-A73 L Lead wire length Nil L Z N 0.5m 3m 5m None Applicable for the connector style (DC) only Applicable auto switch with 5 meter lead wire ("Z") Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73(C)(H)/A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard (Except D-F9/F9lV) The standard lead wire length

ZP

N 10 D Model A B C D E Y q Pad dia.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

rail mounted style [-D].

3

D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V MK MK MK2T CK1 CLK2 CLKG CKQ CLKQ Auto Switch Proper Mounting Position (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V D-M9V D-M9WV D-M9AV CK CLK D-M9A D-A9 D-A9V Bore size (mm) D-M9V D-M9WV CKQ Hs Hs Bore size A B W A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Free Mount Cylinder for Vacuum Series ZCUK

ZC(D)UKC25 1/8 19.5 5 to 50 22 40 62 5 12 11 12 24 29 51.5 23 34.5 ZC(D)UKC32 1/8 1/8 M5 x 0.8 1/8 11 12.5 20 32 2 6 7 8 13 17 28 31 12 5 to 50 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 19 21.5 33.5 34 15.5 5 to 50 H J L MM P Q QA R S SA T Y Z Model ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

Mechanically Jointed Rodless Cylinder Series MY2

Proper Auto Switch Mounting Position (Detection at stroke end) C D A B D-A9, D-A9V D-M9, D-M9V, D-M9W, D-M9WV B B Series model A Series model A Operating range Operating range MY2C16 MY2C16 44 116 48 112 MY2H16 MY2H16 46 114 50 110 MY2HT16 MY2HT16 11 8.5 70 90 74 86 MY2C/H/HT25 MY2C/H/HT25 54 156 58 152 MY2C/H/HT40 MY2C/H/HT40 85 245 89 241 Series model C Series model C D D Operating range

Series CQ2

, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

6 8 11.5 6.5 32 18.5 13 16 11.5 15 18.5 14.5 13.5 19.5 13.5 8 10 13.5 8.5 40 23 17.5 17 21 19.5 23 24 20 18 19 13.5 15.5 19 14 Auto switch mounting heights (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A44 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C Bore size (mm) HS HS HS HS HS 24.5 27.5 27 62 72 20 27 30 29.5 64.5 74.5 25 30.5 33.5 33 68 78 32 40 35 38 37.5 72.5 82.5

Air cylinder

(The tightening torque should be about 2 to 3 Nm.) (5) Modification of the detecting position should be made in the condition of 3. 16 Table 3 Table 4 17 Table 5 Auto switch model D-Y59 D-Z7 D-Z80 D-Y69 D-Y7P D-Y7H D-Y7W D-A3 D-A44 D-G39 D-K39 D-M9 D-M9V D-M9A D-F5 D-J5 D-J51 D-Y7BA D-P4DW D-A5 D-A6 D-A9 D-A9V Bore size A B A B A B A B A B A B A B A B A B 32 10 6.5 14 10.5 7.5 4 7.5 4 7 3.5

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VCB

78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27