HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Filter Regulator

Note 4) -10- 6.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources.

Mist Separator

Do not use the product where these are present.

AC Servo Motor Driver (MECHATROLINK-III type)

5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Micro Mist Separator

Do not use the product where these are present.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

Lubricator

Bowl Assembly Specifications 10-14 7. Assembly of Optional Parts 15 8. Operation and Adjustment 16-19 8-1. Adjustment of Dripping Amount 16 8-2. Lubrication 17-18 8-3. Oil Discharge from the Product with Drain Cock 19 9. Trouble Shooting 20 10. How to Replace the Components 21-30 10-1. Bowl Assembly Replacement 21-23 10-2. Bumper Retainer Assembly Replacement 24-27 10-3.

Vacuum Regulator

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these. 2. Do not use in locations influenced by vibrations or impacts. 3. This vacuum regulator always uses atmospheric air, therefore, do not use in dusty environments. 4.

CEx-OMB0075

Do not ground it with devices generating strong electromagnetic noise. 3. Do not pull sensor cable strongly. Such action may cause failure. 4. Check wiring Incorrect wiring may cause damage or malfunction of the products. Make sure the wiring is correct before operation. 4. Power supply line Do not mount any switch or relay to power supply line (12 VDC to 24 VDC).

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

Warning Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

EXxx-OMC0002

Do not use the product in an environment where corrosive gases or fluids can be splashed. Otherwise damage to the SI can result, causing malfunction. Do not use the product in an area where surges are generated.

VQC5000Series

Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3.

Process Pump

Measures should be taken to avoid leakage, such as installing a drain pan, so that people and equipment will not be adversary affected. 10 Caution (1)Operating temperature The pump can be used within the range from 0 to 50 oC. Do not let it freeze. 5.

AIR GRIPPER

Before piping Before piping, blow air (flush) or clean the piping to remove any cutting chips, cutting oil, dust, etc. 10 - 2-6. Operating environment ! Warning 1. Do not use in an environment where corrosive gases, chemicals, sea water, water or steam are present. 2. Do not use in direct sunlight. 3. Do not operate in a location subject to vibration or impact. 4.

New

Do not attempt to rotate, as the connector does not turn.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12