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Wrapping direction Expose approx. 2 threads Sealant tape 23 Series CXSJ Actuator Precautions 2 Be sure to read before handling. Mounting Mounting Air Supply Caution 1. Use the product within the range of specifications for fluid temperature and ambient temperature.

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

(T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance L (mm) Refer to page 304 for deflection data. 230 23

AS331FE-03-10SK 21 32.6 43.7 10 18.5 62 53.5 23 16.2 AS331FE-03-12SK 22 34.4 44.9 12 20.9 64 55.3 AS431FE-04-10SK 25.8 21 32.6 49.4 10 18.5 103 58 16.2 17 R 1/2 24 51.5 56.5 59.7 64.7 28.6 AS431FE-04-12SK 26.8 22 36.3 52 12 21.7 105 61.7 19.4 Reference dimensions of R thread after installation. 15-9-39

11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34 Side A

Refer to "Flow Characteristics" p.4.6-23 and figure of "Max. air flow" p.4.6-23. Specifications Compressed air 1.0MPa Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Filtration 0.05MPa 1.5MPa Due to its special configuration, series AME indicates the life of the filter element by a color change.

(different sides) 25 Auto Switches/Proper Mounting Position for Stroke End Detection D-Z7, Z80 D-Y59, Y69, Y7P D-Y7NW, Y7PW, Y7BW D-Y7BAL A 0 to 1 A B Bore size (mm) B 40 0 23 50 0 23 63 0 32 1in = 25.4mm Auto Switch Mounting Flat head watchmakers screw driver When mounting an auto switch, first hold the switch spacer between your fingers and press it into the groove.

P 20 25 32 40 4 4 5.5 M6 X 1 3.5 60 25 26 54 M8 X 1.25 depth14 35 80 105 50 93 12 M5 X 0.8 MGP 7 7 9 4 70 32 31 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 103 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 7 7 9 4 70 32 38 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 104 MGQ 8 8 11 4 38 47 67 45 75 12 150 M8 X 1.25 115 M12 X 1.75 depth 21 82.5 115 MGG Bore size (mm) WH U W Y T V Wq Z X 20 25 32 40 23

23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed vertically, the total load that is applied to the tip of the piston rod must be within the thrust of the rectilinear portion in which the load ratio is taken into consideration.

P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A, R port) M5 x 0.8 23

7 7 5 L3 VQ P = 19 16 n-Rc 1/8 2(A) port VKF 23 8 19.5 VQZ VZ VS VFN L Dimension n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 113 103 89 4-13-9

Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12. Dimensions 30 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

NBR O-ring 15 Carbon steel With adjustment bolt 16 Heat treated, Nickel plated Carbon steel Hexagon nut 17 Nickel plated Stainless steel Hexagon socket head cap screw 18 Stainless steel Hexagon socket head cap screw 19 Carbon steel Hexagon socket head cap screw 20 Nickel plated Carbon steel Button bolt 21 Nickel plated Stainless steel Hexagon socket head cap screw 22 SE type only Label 23

11 2 18 25 15.5 41.5 5 33 Angle adjustment bolt 63 11 2 x 4.5 through 2 depth 4 +0.025 0 3 x 3H9 (one each on three sides) 2 x 8 depth of counter bore 2.5 10 long groove depth 3 +0.025 0 3 x 3H9 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 M5 x 0.8 Port A Port B 4 x M4 x 0.7 depth 6 N J I E A D P A A M N 2 C M S R R E O P T 6 P A R I R Y G A R I 18 6 21 9 5 5 34 23 Side A Side B 726

Hs A B A W CQS CQ2 RQ CQM Auto Switch Mounting Height (mm) MU Proper Auto Switch Mounting Positions (mm) D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9V D-M9V D-M9WV D-M9AVL D-A9 D-A9V D-M9AL D-M9AVL Bore size Bore size Hs 17 19 22.5 24.5 27 30.5 36.5 40 50 60 Hs 19 21 24 26 29 32.5 42 42 52 62 B 0.5 0 3.5 5.5 5 7.5 10.5 13.5 18 23 W 1.5 2 1.5 3.5 3 5.5 8.5 11.5 16 21 A

No.PF-OMM0005-N PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PF3W7## Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 14 Definition and terminology 15 Mounting and Installation 17 Installation 18 Piping 20 Wiring 23 Flow Setting 26 Function Setting 29 Default settings 30 F1 Setting of OUT1 31