Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

24 RX(n+1).9 RY(n+1).9 Valve output 25 RX(n+1).A RY(n+1).A Valve output 26 RX(n+1).B RY(n+1).B Valve output 27 RX(n+1).C RY(n+1).C Valve output 28 RX(n+1).D RY(n+1).D Valve output 29 RX(n+1).E RY(n+1).E Valve output 30 RX(n+1).F RY(n+1).F Valve output 31 n: Start address -41No.EX-OMW1003-A Bit area (2) Input register Slave -> Master Output register Master -> Slave Corresponding Unit No.

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

JXCx-OMT0002

[Setting example] (1) Axis 1: 1, Axis 2: 2, Axis 3: 2, Axis 4:3 The order of returning starts from Axis 1, then Axis 2 and 3, and then Axis 4. ORIG order 1 to 4 X (2) Axis 1: 1, Axis 2: 1, Axis 3: 1, Axis 4:1 Four axes return simultaneously. Caution Simultaneous return to origin of 4 axes is not synchronous. Adapter file version Fixed value This is a fixed value for this controller.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

2-Color Display Digital Flow Switch Series PFM

Piping Variations PFM Female thread: Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8, 1/4 One-touch fitting: 4, 6, 8, 1/4 Bottom Straight Bottom Straight PFMV Without flow adjustment With flow adjustment PF2A S S 1 2 1 2 S S 1 1 2 2 PF2W PF2D IN 1 IN 1 IN IN IF S S 1 2 S 1 2 S 1 2 1 2 IN IN 1 IN IN 1 Mounting Bracket Bottom mounting Panel mount DIN rail Through-hole mounting 901 Main Functions Selection

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

DOC1003626

DOC1003626 Contents Contents Read before using . 1-1 1.1 Operation mode and operation method . 1-2 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-5 1.4 Touch panel flow . 1-6 Contact input/output communication / Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Body (1) (1) With (1) With (w/o light) Base mounted 5 Note 1) Applicable to VQZ2000 and 3000.

VZS

For VZS2000 New: BG-VZS2000-1 (Ditch groove): Set of gasket 1 pc. and mounting screw 2 pcs. Old: BG-VZS2000 (Plate gasket): Set of gasket 1 pc. and mounting screw 2 pcs. For VZS3000 New: BG-VZS3000-1 (Groove gasket): Set of gasket 1 pc. and mounting screw 3 pcs.

EXxx-OMZ0016

) 1 +COM(US2_24V) 2 n+1 2 n+1 3 -COM(US2_0V) 3 +COM(US2_24V) 4 n 4 n * -COM is connected to 0V (US2) and +COM to 24V (US2) inside the product as shown in the circuit diagram below.

Air Cylinder CP Series Cylinder Positioner Assembly

Slrcke = 0.79 (20mm) with Bool Millmelersrn Pareh$eses 7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS REPAIR KITS SINGLE CLEVIS aoaE d,E L1 dNo NX 2.36 t-05 2 . 9 1 1.06 1 . 1 0 M 1 8 x 1 . 50.61 4.79 \20) 02 +0.070) (,27) (60) (28) \74) 115.5) 047 + 0.003 I 1 o 2.36 0.79 r.05 2.91 1.06 M 1 8 x l . 5 0 6 i (r2 +0.070) (16 "') (28) (60) (15.5) 120) \211 (13+0.070) 1 1 0 ; f f (28 ;)

Modular Type Regulators Series AR

Modular Type Regulators Series AR Regulator Series AR Port size Model Options AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 Bracket AR40-06 3/4 Square embedded type pressure gauge (except the AR10) AR50 3/4, 1 AR60 1 Pages 346 through to 355 Round type pressure gauge Regulator with Backflow Function Series ARK AR20K 1/8, 1/4 Digital pressure switch (except the

Fieldbus system DeviceNet TM compatible SI unit

) 0 1 EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2 channels/2 channels) (2 byte

Vacuum Unit

is available in units of 1 piece.)

Fieldbus system EtherNet/IP TM compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

PFxx-OMA1007

Port 3 short circuit VP short circuit 26 Reserved 27 ITV-PQI 28 Port 4 PQI Isolation input signal (Port 3) Standby input signal X2 (Port 4 input) X4 (Port 4 input) 29 Reserved (Port 3) 30 to 45 Port 4 IO-Link process data 46 Remote 1 data : : : : Remote 10 data -80No.PF-OMA1007-B Byte 20 Details Bit Description Value 0 Accumulated flow unit 0: L 1: ft3 1 Flow Reference Condition 0: STD 1:

JXCx-OMT0028CN

(1) 250 bit1 Bit0 0 0 0 1 1 0 46 - (2)READY 1(ON) (3)ALARM 1 1(ON)0(OFF) (4) 0(OFF)1(ON) (5) 1 1(ON)0(OFF) (CN2SW)ON (GW [OUT Data]Address.250, bit7)ON (6)() ID ON(1)ID OFF(0) (GW [OUT Data] Address.251 Address.252) bit 7 6 5 4 3 2 1 0 Address 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 (7) (LEC)ID ID 2 bit 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12