Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

E-MY2B_E_A

1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000 UNITED KINGDOM / (44) 1908-56 3888 To facilitate recycling, this manual is printed using biodegradable soy ink, which can easily be de-inked.

SI Unit for Vacuum Manifold

Troubleshooting 41 -2No.EX-OMY0014-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Precision Cylinder Series MTS

2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

Air Cylinder NCM Series Stainless Steel Cylinders

Stainless Steel Body for Low Breakway Friction Double Roc/Double End Mounting 6 Available Mounting Options Non-Rotating Option Auto Switch Capable Air Cylinder: Standard Type Series:NCM Series NCM How Toordcr NC DMrB075-02 00 C S J 851 xB6 T r I Lo**" Auto-Switch Capable I xB6 -High Temp. I XB7 -Low Temp.

Pneumatic Positioner IP300/IP3100

06 6kgticnf 11 30psi 12 45 psa 13 150 psi 22 23 24 26 41 I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm

Vacuum Regulator Series IRV

With multiple pressures IRV 000 1 01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

ChemicalThermo-con

2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53) POWER COMMUNICATION IN WATER I N O N WATER OUT DC 1.6 (41

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C