Speed Controller: Standard Type Series AS In-line Type

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-34 Speed Controller: Standard Type In-line Push Locking Type Series AS Construction Dimensions Component Parts No.

17

50 51 100 300 200 0.22 (0.1) 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 110 (50) 110 (50) 100 100 100 100 80 80 80 80 63 63 50,63 50,63 50 50 22 (10) 22 (10) 40 40 40 40 11 (5) 11 (5) 32 32 Load mass m lbs (kg) Load mass m lbs (kg) 32 32 25 25 25 25 20 20 20 20 2.2 (1) 2.2 (1) 16 16 16 16 12 12 12 12 0.22 (0.1) 10 20 30

Low-Speed Rotary Actuator

Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.

SFOD-OMT0009CN

/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B Revision history 2015 9 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel + 81

Intrinsically Safe Valve

: Red (+) 2 x 4.2 (Manifold mounting hole) 20 42 2 x 1/4" {A(4), B(2) port} 44 (E-type) (14) (52) 1.2 (2 x 4.2 mounting hole) 1.2 125 (49.5) 0.3 mm2 (42.5) 40 40 14.7 (39.4) 123.3 L (Lead wire length) 1/4" {P(1) port} 2 x 1/8" {EA(5), EB(3) port} 40 12.5 0.9 18 39.4 2 (23.9) EB P EA 36 2 x 2.2 (For manifold gasket positioning) (66) L-type plug connector with cover (LL) 53-SY7120-LL-02 (-F2

Industrial Filters

65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B)

SFOD-OMT0010

/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Buffer stroke Pad diameter Buffer stroke 10 13 16 20 25 32 40 50 10mm 20mm 30mm 40mm 50mm Interchangeable with standard type. 15 Rotation 15 Exchangeable at the adapter.

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

MHF2

port Mounting thread 40 104 90 20 E 7.7 14.8 15 19 25 E 0 -0.1 4-3.4 through (mounting hole) 20 27 1 27 1 4-5.5 M5 x 0.8 +0.1 0 Close: 0 Finger opening port E-E Open: 481 Use the attached hexagon socket head screws for mounting holes. 4-M4 x 0.7 thread depth 5 Mounting thread 8-M3 x 0.5 thread depth 4 Attachment mounting thread 80 M3 x 0.5 5 33 15 20 Accessory option: Hexagon socket head

Modular/F.R.L. Units Series AC

) Note 15) Note 15) Note 15) Note 15) Note 15) Note 15) Note 12) For thread type: M5 and NPT.

CS1

50 36 59 16 15 35 14 19 14 30 98 47 90 43 31 to 1400 Lube Non-lube Air-hydro 128 M30 X 1.5 1/2 161 75 40 160 212 112 255 M14 X 1.5 110 232 133 255 50 36 59 16 15 35 20 47 90 43 14 19 31 24 98 to 1400 0.2 X Stroke 144 M36 X 1.5 3/4 182 18.5 106 75 40 180 236 118 275 M16 X 1.5 120 252 141 273 20 19 56 53 40 90 59 43 14 17 36 26 39 to 1400 162 3/4 M40 X 1.5 204 85 45 18.5 111 200 115 265 132

Square Tube Type Air Cylinder Series MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

High Power Cylinder Series RHC

12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 29.5 30 27 25 25 15 17.5 12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 33 33.5 30.5 32 32 15 19.5 12 20 12.5 18 10.5 21.5 14 16.5 9 22.5 37.5 38 35 40 40 20 24.5 17 25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5

T

Refer to pages 15-18-3 to 4 for Safety Instructions and Common precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Min. bending radius (mm) 12 15 23 27 31 60 12 15 23 30 40 Operating temperature 20 to +60C (No freezing) Nylon 11, Nylon 12 Material Caution 1.

Low Profile Air Gripper Series MHF2

15 54 460 Low Profile Air Gripper Series MHF2 Dimensions MHF2-12D2 3H9 +0.025 0 depth 3 26 26 26 3H9 +0.025 0 depth 3 4 x M4 x 0.7 thread depth 10 94 4 4 (Mounting thread) 2 x M4 x 0.7 thread depth 5 M5 x 0.8 (Mounting thread) Finger closing port 40 104 90 20 E 7.7 14.8 15 19 25 E 4 x 3.4 through (Mounting hole) MHZ 0 0.1 20 27 1 27 1 MHF 4 x 5.5 M5 x 0.8 Close: 0 +0.1 0 Finger opening port

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

HRX-OM-Z002

Fig. 9-15 Pump capacity diagram Model No.HRLE090-20/40 * This pump capacity is flow rate of CH1 when flow rate of CH2 is 2L/min. Fig. 9-16 Pump capacity diagram (standard product) HRLE Series 9.6 Pump Capacity 9-15 HRX-OM-Z002 Chapter 9 Documents Model No.HRLE090-20/40-P * This pump capacity is flow rate of CH1 when flow rate of CH2 is 2L/min.

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100