HRX-OM-I051

TEMP READY is displayed on the operation display panel 60-sec. after TEMP PV value becomes 18 to start output by communication. Necessary condition is that TEMP PV value after 60-sec. is 20+/-2.0 or less. See 5.3.4 Status screen 3 on page 5-4 for the details of display position.

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

F

-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

18 stations Option * All std. 1W valves.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Standard stroke Method Stroke range Bore size (mm) Stroke range (mm) 32 to 100 1 to 99 Part no.: CQ2YB50-57DC CQ2YB50-75DC with 18 mm width spacer inside. B dimension is 125.5 mm.

CV/MVGQ

13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to

High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Standard stroke Method Stroke range Bore size (mm) Stroke range (mm) 32 to 100 1 to 99 Part no.: CQ2YB50-57DC CQ2YB50-75DC with 18 mm width spacer inside. B dimension is 125.5 mm.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Refer to pages 6-9-12 to 6-9-18.

HRX-OM-T004

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRS090 Series 2-18 HRX-OM-T004 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

HRX-OM-R028

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRSH Series 2-18 HRX-OM-R028 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

MX-OMP0051

A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,

Low-Speed Rotary Actuator

*Auto switches are shipped together, (but not assembled). -18- Specifications Table 1.

Series MLGP

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

AIR SLIDE TABLE

If grease is replenished, use lithium grease. 18 3-3 Construction/Parts list Component parts No.

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

Sine Rodless Cylinder Series REBR Direct Mount Type

HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5 57.5 72.5 25 69.5 43 M8 x 1.25 63.5 130 M8 x 1.25 12 23 132.5 Model NL NT PA PB PP PS S TW W XB Z REBHT25 REBHT32 18 9 65 108 18 51 209 110 136 9.5 250 22.5 12 66 115

HRX-OM-M091

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRS Series 2-18 HRX-OM-M091 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.

HRX-OM-Q033

Set the signal which is suitable for the external switch prepared by the customer. 2.5 Contact input signal HRSH Series 2-18 HRX-OM-Q033 Chapter 2 Contact input/output communication 2.6 Contact output signal There are three contact output signals.