High Power Cylinder:

17 22 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NE 33.5 37 43.5 52.5 K 5 5.5 5.5 7.5 NC 5.5 5.5 4.5 4.5 JD 30.5 25.5 28.5 23 NB 30 36.9 43.9 47.3 JC 43 39 36 32 NA 26 32 38 41 I 26 31 38 47 H 44 48 51 54.5 N 22 27 27 30 WH ZZ 252 257 265 277 5.8 to 8.8 6.8 to 11.3 4.10-9 Series RHC Construction u q !

PFxx-OMX0007

For IO-Link type, upper 6 digits are displayed and 103 or 106 or 109 turns on for accumulated flow rate. 17: Set the time for digital filter to the sensor input.

JXCx-OMT0028CN

065500 mm/s 5 L 6 H 7 4 2147483647 0.01mm 8 9 L 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L H=L= (LECP6)(LECA6) 42 - Bit/Byte / Address ID No. 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s ID1 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219

Vacuum Unit Ejector / Vacuum Pump System

Installation 17 3.1. Installation 17 3.2. Air Supply 19 3.3. Piping 20 4. Solenoid Valve 23 5. Pressure Sensor/Pressure Switch 29 6. Construction/Replacement Parts 30 6.1. Construction for Single Unit 30 6.2. Component Parts 30 6.3. Replacement Parts 31 6.4. Replacement Parts for Single Unit/How to Order 31 7. Exploded View of Manifold/Replacement Parts 35 7.1.

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Air Slide Table Series MXW

Load Mass W Maximum Load Mass 20 MXW25 17 W 15 Maximum load mass (kg) (kg) 12 MXW20 10 W Model MXW16 7 MXW8 1.8 6 5 4 MXW12 4 MXW12 3 MXW16 7 2.5 MXW20 11 2 MXW8 1.7 1.5 MXW25 17 W W 1.2 1 Note) No need to consider this load factor in the case of using perpendicularly in a vertical position. 50 100 200 300 500 Piston speed (mm/s) Graph (1) Mp/Mep (Pitch moment) My/Mey (Yaw moment) Mr (Roll

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2HT-A16L MY2H-A16L X417 Combination Symbol Stroke adjusting unit Holder mounting bracket + Nil N Holder mounting bracket only Holder mounting bracket X416 X417 Holder mounting bracket 1 Holder mounting bracket 2 Stroke adjusting unit model Note) Refer to the options table of "How to Order" on page 1. 17

Sine Rodless Cylinder Series REBR Direct Mount Type

8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

S Couplers

10.0 85 95 92 97 101 119 14 17 17 19 19 24 22 22 22 22 22 24 27 42 39 46 48 86 4.5 5.5 6.0 8.0 8.0 8.0 13.7 16.4 16.5 17.4 17.4 20.1 One-touch fitting type L2 Plug dimension when socket is connected. 13 26 D D M M L1 L1 L3 When connected Min. hole size Min. hole size Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" M Weight g Model

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7 20.6 66 (65) Note 1) Reference dimensions Note 2) Reference dimensions of threads

Round Type Hydraulic Cylinder

19 18 23.5 A 13.5 11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

Ejector Valve Unit Series ZYY/ZYX

mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

) 18.5 (17) 20 20 12.5 12.5 22.5 22.5 2026.5 (25) 20.5 (19) 28 22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

SFOD-OMT0005CN

(P.52) 8.3 / 8.4 () JXC91 ( 12) (ON )No 13.3 (P.57) -31- 9 9.1 (1) Offset (Word) 0 1 2 () 3 () 4 5 6 () 7 () 8 12 9 34 10 11 12 13 14 15 16 17 -32- (2) Word0 Word Bit 0 OUT0 DRIVE OFF No. Bit No.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Electric Actuators Precautions . 8 2.1 Wiring/Cables . 8 2.2 Design/Selection . 9 2.3 Mounting . 10 2.4 Handling . 11 2.5 Operating Environment . 13 2.6 Maintenance . 13 2.7 Actuator with Lock . 14 2.8 Design/Selection . 15 2.9 Handling . 15 2.10 Mounting . 16 2.11 Power Supply . 17 2.12 Grounding . 17 2.13 Wiring . 17 2.14 Maintenance . 18 3.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

17 DIN terminal gasket Rubber mount CR NBR 18 18 DIN connector DIN connector type solenoid coil 19 Clip Stainless steel 20 DIN terminal gasket CR 21 DIN connector 229 Series VCH40 Dimensions VCH41 (N.C.) 1 (56) 41 62 50 17 (44) G1/2 128.5 Applicable cable O.D. 6 to 12 111 1(IN) 2(OUT) 22 Hexagon width across flats 38 98 2 x G3/4 x 16.3 2 x G1 x 19.1 56 VCH42 (N.O.) 1 (56) 41 17 62 50

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Note Main parts 16, 17, 18, 19 MHC6-PS Seal kit MHCA2-6 (Short body) Double acting/with fingers closed Single acting Double acting/with fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.