Table of Contents

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

CRB2/CRBU2/CRB1

R F (h9) E (g6) Model A Q B C D G K L M N P Y 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S M3 X 0.5 with depth 5 M5 X 0.8 M5 X 0.8 M3 X 0.5 M3 X 0.5 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M3 X 0.5 with depth 5 M4 X 0.7 with depth 7 M5 X 0.8 M5 X 0.8 M5 X 0.8 with

Table of Contents

x 0.8 (Port) XX XX VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1MG MY1MG (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5 13.5 8.5 16.2 40 10 M5 x 0.8 3.6 80 22.5 40 54 M4 x 0.7 20 MY1M16 14 28 56 40 6 27.7 100 7.5 4.5 12.5 12.5 20 46 12 M6 x 1 4.8 100 23 50 58 M5 x 0.8 25 MY1M20 7.5 33.7 17 34 60 50 Detailed Dimensions of

ZP

buffer Mounting Vacuum inlet direction Symbol Thread size A5 B5 M5 x 0.8 (Male thread) M5 x 0.8 (Female thread) Direction Lateral Symbol Pad material () R Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber N S U F GN GS Pad size Vacuum inlet () Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Pad

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VV5K3-20-06 VV5K3-40-06-M5 Common SUP/Common EXH VK Type 20: Body ported (A, B port top ported) Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 How to Order A port: Rc 1/8, M5 x 0.8 VZ VV5K3 20 05 A, B port Rc 1/8, M5 x 0.8 VK3120 Thread type VF VK332 Valve stations Nil 00F 00N 00T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A VFR G NPT 20 20 stations R port:

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Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

KJ

Note) D1: Max. diameter M5 x 0.8 10.4 8 14 8 14 17 9.8 13.4 9.8 13.4 17.6 20.5 22 23.5 24.5 25 11 15.5 12.5 15.5 20 17 20 25.5 22 24.5 24.5 25.5 20 29.5 20 29.5 38.5 31 38.5 45.5 41 45.5 45.5 50 16 16 4 1 8 M5 x 0.8 25.5 16 25.5 32.5 27 32.5 39 35 39 39 42 D1 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 6 12.8 17 L3 L2 17.6 28.5 M5 x 0.8 17 15.2 8 18.5 D2 25.2 20.6 25.2 25.2 29.5 22 22 19

CJ2

Material: Iron CD(cd) 3.3 5 MM M4 x 0.7 M5 x 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 GB 18 23 H 20 20 KA 4.2 5.2 CX 3.2 6.5 A 15 15 BA 12 18.3 BB 12 18.3 CA 14 20 CB 14 20 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

Air Fittings & Tubing

A (1) <M5> <M5> M Weight (g) L3 D1 D2 L1 L2 Part No. 6 19 7 19 36 29 37 66 48 68 70 93 KQ2VF04-M5 KQ2VF04-01S KQ2VF06-M5 KQ2VF06-01S KQ2VF06-02S KQ2VF08-01S KQ2VF08-02S KQ2VF08-03S KQ2VF10-02S KQ2VF10-03S KQ2VF12-03S KQ2VF12-04S M5 X 0.8 8 14 9.8 13.4 9.8 13.4 17.6 20.5 22 23.5 24.5 25 11 15.5 12.5 15.5 20 17 20 25.5 22 24.5 24.5 25.5 20 29.5 20 29.5 38.5 31 38.5 45.5 41 45.5 45.5 50 16 16

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

SYJ300/500/700

VQZ VZ VS VFN 4-4-25 26 Series SYJ500 Manifold for Internal Pilot Type How to Order Applicable solenoid valve SYJ512--M5 SYJ512M--M5 SYJ522--M5 SYJ522M--M5 A port M5 x 0.8 Type 20 SS3YJ5 20 05 Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P

ZP

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

Table of Contents

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.