MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

MU

, 20 5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

1

17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

15 15 42.5 34.5 30 24 88 64 62 62 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M14 x 1.5 M32 x 2 Axial Foot (L): CBM2L, CBM2L 10112122H A K F AL H2 Relief port M5 x 0.8 24 2 x P (Rc, NPT, G) F DL 2 x NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4 x LD 2 x LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

LEC-OM02904

G3-G4 120V AC/DC 0.5A/4.8VDC 2.4VA 11 15 11 (4) (a) LEC-MR-RB-12 [mm] TE1 TE1 G3 36 40 6 6 G4 P 15 C 2AWG24~2.5mm 2AWG12 0.2mm 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[Nm] 5 TE1 1.1[kg] 6 149 2 (20) 169 (b) LEC-MR-RB-032 [mm] TE1 TE1 6 6 30 G3 15 G4 P C 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 2AWG24~2.5mm 2AWG12 0.2mm 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

Applicable Auto Switch Model

17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.

CL

6 6 8 15 15 15 15 35 40 40 50 178 193 196 221 38 41 41 41 154 169 23 25 28.5 33 30 30 35 35 11 11 11 12 16 17 17 17 11 11 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 55 62 62 70 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

CRB1/Size: 10, 15, 20, 30

(MPa) 0.2 0.15 Speed range(1) (sec/90) 0.03 to 0.3 0.04 to 0.3 0.0003 Allowable kinetic energy (J) 0.02 0.0012 0.0033 Size 10 Size 15 Double vane 15 Shaft load Allowable radial load 30 15 25 10 (N) Allowable thrust load 25 10 20 Bearing Bearing Order Made Port position On the body side or in the axial direction P.1.1-20 to 1.2-28 Port size (Body side, Axial direction) M3 X 0.5 M5 X 0.8 Shaft

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Modular F.R.L. Unit

E Octagon Port size C T-interface B F.R.L. body center D A Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable models AC10, AC10B AC20, AC20B AR20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C C 12 D 14 E 8 B 19 A 11 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Mounting-Caution

High Vacuum Angle Valve, XL Series

With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14). In the case of the XLFV, port P (19) is normally pressurized, and the valve (15) opens when the solenoid valve (18) is turned ON, and closes when it is turned OFF. Operation is the same as that of the XLF.