INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Piping Adapter: 3/8, 1/2 A piping adapter allows installation/removal of the component without removing the piping and thus makes maintenance easier.

DOC1001322

Selected maintenance reminders occurredclosed Selected maintenance reminders occurredopen Maintenance remainders status signal 18 Select Maintenance About selectable maintenance remainders Refer to "Table 5.4-26 List of maintenance reminders".

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

24 38 0.15 0.29 0.56 1.04 2.6 8.5 10 16 21 18 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

VQ7-6/7-8

(86) 62 (72) 75 (86) 62 (72) 50 PA R2 R1 P A B Indicator light 2-7.5 Mounting hole 2-Rc1/8 49 (64) 49 (64) (20) 18 18 (20) 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) 44 (58) 44 (58) G1/2 (cable 6.8 to 10) Bottom port drawing Rc1/8 Port Y (PE) 141 (154) 153 (166) SMC 108.5 (121.5) 23 (30) (ports A, B) Y 12 50 (63) 38 (53) 3 5 38 (53) 32 (42) 23 (30) 1 2-Rc3/8, 1/2, 3/4 Ports R1, R 2-Rc3/8, 1/2, 3

3 Position Cylinder Series RZQ

RZQ Foot type/RZQL Foot type (mm) B + Full stroke L Bore size (mm) A LH LS L LD LG B 30 18 6.6 4 107.7 82.5 66.5 32 Special cap bolt 33 18 6.6 4 92 76 117.2 40 39 22 9 5 96.5 73.5 126.7 50 LY 46 102 28 11 5 76 138.2 63 LH Bore size (mm) LX LY LZ X Y X Y X Y LS Full stroke LG LZ LX 4-LD 57 57 71 11.2 5.8 32 A + Full stroke 64 64 78 11.2 7 40 79 78 95 14.7 8 50 95 91.5 113 16.2 9 63 Front

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

MXW

MXW16 7.4 12 0 6H9 + 0.030 depth 5.5 M6 x 1 MXW20 7.4 12 0 8H9 + 0.036 depth 9 M8 x 1.25 MXW25 18 16 0 2. Through-hole H Caution l 1. The positioning hole on the table and on the bottom of the body does not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

18 DIN connector DIN connector type solenoid coil 19 Clip Stainless steel 20 DIN terminal gasket CR 21 DIN connector 229 Series VCH40 Dimensions VCH41 (N.C.) 1 (56) 41 62 50 17 (44) G1/2 128.5 Applicable cable O.D. 6 to 12 111 1(IN) 2(OUT) 22 Hexagon width across flats 38 98 2 x G3/4 x 16.3 2 x G1 x 19.1 56 VCH42 (N.O.) 1 (56) 41 17 62 50 (44) G1/2 139 Applicable cable O.D. 6 to 12 121.5

AC Servo Motor Driver (SSCNET Type)

(SeeLECSS Operation Manual (Simplified Edition),section 6.3.2 for uploading.) -41- 6.8.2 To Load saved Parameters From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters from. Click Open.

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

LECP6_C

CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

Programless controller Step motor (servo 24 VDC)

External Wiring Diagram . 18 4.1 CN1: Power supply cable . 18 4.2 CN2: Motor power connector and CN3: Encoder connector . 18 4.3 CN4: Parallel I/O connector. 18 5.

Process Valve Series VNA

40 50 1 8 1 4 3 8 18 In the case of EZ or TZ or DZ, the length is longer by 9 mm.

Vacuum gripper

ModelZPGU-7A-X2 (Suction cup formFlat type) ModelZPGC-7A-X2 (Suction cup formFlat type with ribs) Dimensions Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG13U-7A-X2 13 15 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20U-7A-X2 20 23 ZPG25U-7A-X2 25 28 ZPG32U-7A-X2 32 35 20 24.5 4.5 Dimensions Model A B D E F Y ZPG10C-7A-X2 10 12 1.7 ZPG13C-7A-X2 13 15 1.8 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20C-7A-X2 20 23 1.7

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

13 15 18 24 38 11 13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26 D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24

VCA

+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161

MX-OMP0051

A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,

AIR SLIDE TABLE

If grease is replenished, use lithium grease. 18 3-3 Construction/Parts list Component parts No.