EXxx-OMN0029CN

SI PWR_LED DC24 V10% SI PWR(V)_LED DC24 V+10/-5 14 PLC -42No.EX-OMN0029CN-D EX600 /PLC H.T.PLC H.T. H.T.PLC H.T. PLC PLC PLC H.T. No. (H.T.) H.T. EDS SI OFF/ SI Switch Hold/Clear (Hold/Clear) 1 TM EDS DeviceNet H.T. OFF/ /ON Handheld -43No.EX-OMN0029CN-D SI No. (H.T.) H.T.

asilltr

'/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

KN Series Nozzles for Blowing

KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 14 14 14 14 14 14 14 9 9 9 13 13 13 13 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 D 2 Connection thread H1 A L1 Reference dimensions after R thread installation. 862 Nozzles for Blowing KN Series Sensing

Cylinder with Lock Series CNS

19 14 190 100 230 16 155 to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 16 180 to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 18.5 215 (mm) Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 85.5 303 87.5 20 23 110 432 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 93.5 343 95 20 28

JXCx-OMT0005CN

(P.64) * 7 PLC DeviceNet LED LED PWR ALM MS NS DeviceNet (()) LED 8.LED (P.31) (JXC)LEDNSPLC PLC 20.P.80 PLC 10 - 8() ()() () 9 10.P.33 PLC 14.P.53 11 - 3 3.1.

Cylinder with Lock Series CLS

PLC: Programmable Logic Controller Refer to pages 14 through 19 for sections related to auto switches.

Peltier-type Chiller Thermo-con/ Compact Type

This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

SFOD-OMT0012

Otherwise, this may cause injury and/or an accident. 14 No.SFOD-OMT0012-A (1-5) STOP button When the STOP button at the top of the main window is selected while the actuator is operating, all of the connected actuators will stop by reducing the speed. However, the operation is not stopped when the Stop button is selected in the cases shown in the following Caution.

LA-OMT0056

by the user. . 7 (5) Software installation . 7 2. 2 Controller settings . 8 (1) Start the setup software . 8 (2) Basic Parameter Setup . 9 (3) Step data setting . 9 3Start up procedureTest operation using a computer . 11 3. 1 Test operation using a computer (Step data operation) . 11 3. 2 Test operation using a computer (Continuous operation) 13 4Start up procedureOperation by PLC . 15 41

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

4-channel Flow Monitor ( compatible)

No.PF-OMA1011-A PRODUCT NAME 4-channel Flow Monitor ( compatible) MODEL / Series / Product Number PFG20# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 16 Internal circuit and wiring example 18 Outline of Settings 21 Initial Setting 22 F 0 Connection product

JXCx-OMT0028CN

0255 15 0255 4 16 0255 17 0255 ID1 18 (ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

COQ2BP

D R J (mm) so M8x1 .2S 14 ~ 63 M1Ox1.5 18 80 M12x1.7S 22 NoIe, DIller dlmellSlOIls are same as llYcugh hole type. acnSlu (mm) A 8 C D E F H ..

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?