High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Fieldbus System

(32 pins) Note1) 2) Note 1) Cannot be communicated with the EX600-HT1-l.

Pin Clamp Cylinders

/Mounting Method Applicable cylinder -X2321/-X2322 -X2321/-X2322 -X2321/-X2322 Applicable auto switches D-P3DWAl D-M9lV/M9lWV D-A73/A79W Bore size [mm] 32 32 32 Auto switch mounting bracket part no.

mlu

2-DR CZ 2-CR DH CH DI CI DE DF CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS20-10 13-/22-MXS20-20 13-/22-MXS20-30 13-/22-MXS20-40 13-/22-MXS20-50 13-/22-MXS20-75 13-/22-MXS20-100 13-/22-MXS20-125 13-/22-MXS20-150 792 MXS 1322Air Slide Table Dimensions: MXS 20 1322Axial piping (20) MXS20-P 132265.7 Maximum 11.5 29.5 Operating port 2 x Rc, G, NPT1/8 32 15 20 Other dimensions are the same as those of basic type. 793 MXS 1322Air Slide Table Dimensions: MXS20L

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Refrigerated Air Dryers

4 x 13 (748) (587) Port Size Port Size Part no.

MXS

MXS16L-10 MXS16L-20 MXS16L-30 MXS16L-40 MXS16L-50 MXS16L-75 MXS16L-100 MXS16L-125 125 173 223 3.11-32 Air Slide Table Series MXS MXS 20L/Symmetric style ZZ Z Basic style 0.5 45.5 50 CL 13 M MLGC 5(With stroke adjuster at retraction end) 5H9 5 deep +0.030 0 5H9 5 deep +0.030 0 CNA 2-M6 X 1 thread 13 deep N -1 X F 2 27 25 CB F 22.5 (With stroke adjuster at extension end) CV/MVG 30 30 FF CXW

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

40 50 63 80 100 125 32.5 146 26 7 4 4 4 94 16 12 32 30 M6 x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x

mb1

84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 4 4 5 9 M6 x 1 M14 x 1.5 10.5 M8 x 1.25 M18

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

HRX-OM-Q026

AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B