Air cylinder position, tighten the M3 mounting screw to secure the auto switch by making the bottom face of auto switch attached to the cylinder tube.
0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility
(Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 35 35 35 D-M9AV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs.
-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up
32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119
300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25
(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.
(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 348 Rotary Cylinder Series MRQ Flange Style: MRQFS40 (Max. 11.5) Width across flats 14.2 Note) M6 x 1 depth 7 Number of mounting screws and distance between screws are different depending on the strokes.
15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.
I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%
(6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10
are used 200 200 When 20 units are used Approx. 100% reduction Current model IR3000 Series Approx. 100% reduction 49000 yen reduction 150 150 128000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1200-A Series IR2200-A Series 50 50 IR3200-A Series 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.
Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.
Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.
OFF ON Use the and buttons to enter the flow value that will generate 5 V or 20 mA. The entered flow value can be in the range: 10% rated flow, to the upper display limit. Sub screen 2 20 24 Flow rate[L/min] 20L/min (Analogue 1-5V) Press the button to set. Return to function selection mode. [F22] Analogue output setting complete.
40 50 63 80 100 up to 500 97 89 74 49 50 12 17 up to 500 106 93 95 58 63 16 22 TDe8 TY up to 600 117 105 107 71 75 16 22 up to 600 117 105 130 87 90 20 28 up to 750 147 129 150 110 110 20 34 TT TX up to 750 147 129 182 136 132 25 40 TZ 1.7-35
20 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC Note 1) Follow the same procedure for selecting PVQ10 series. 2) Flow rate depends on individual differences between valves and piping conditions.
5 20 40 5 20 40 2 1 1 0 0 0 20 40 60 80 100 0 20 40 60 80 100 Duty [%] Duty [%] Fig. 4-3 Allowable thrust force setting values.