PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

Direct Solenoid

Mo(rntlng Bas MT33&rl 16. 2 Mounlhg 8a Sclws M5x10 DIRECTIOIIAL AIR VALVES DIMENSIONS/PARTS LIST 3125 3145 NVS 31 SEFIES NVS 3115, NVS 3125 FOOT rOUa{T[{c Prlmary mountlng mlhod ls fool mountlng on the nd of th6 body.

Thermo-chiller

Cap Fluid fill port 18 Series HRS100/150 Optional Accessories q Piping Conversion Fitting This is a tting to change the port from Rc to G or NPT.

IDUS/IDFS

pressure dew point C 14-18-10 11 Series IDUS/IDFS Specific Product Precautions 1 Be sure to read before handling.

Compact and Lightweight

Applicable model Stations Contents2 Screw Accessories ZH2-TB101-A 1 M3 x 20 2 pcs. ZH2-TB102-A 2 M3 x 35 2 pcs. Hexagon nut (M3) 2 pcs. ZH05DA ZH07DA ZH10DA ZH2-TB103-A 3 M3 x 50 2 pcs. ZH2-TB104-A 4 M3 x 65 2 pcs. Flat washer (for M3) 2 pcs. ZH2-TB106-A 6 M3 x 95 2 pcs. ZH2-TB108-A 8 M3 x 125 2 pcs. ZH2-TB201-A 1 M4 x 30 2 pcs. ZH2-TB202-A 2 M4 x 50 2 pcs.

Parallel Type Air Gripper Series MHZ

Note: 1g = 0.0353oz Options Body options/End boss type Single acting type, normally closed Symbol Piping port position Applicable model Double acting Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Single acting Standard Side ported Nil E K H M Axial port 2 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Construction/Standard

IDX-OM-Z004

(17) 17) 40 (K16K) JIS 65A 10K 479 127 1276 51 (14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056

DOC1003626

In the latter case, up to 31 products can be connected. Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 RD RD 3 3 SD SD 5 5 SG SG Controller This product Do not connect any wire to other PIN numbers.

IP80-OM00019

(1) (1) (2) (3) A O B (4) (5) /() 0.2 AB (6) 31 (7) 9. (1)(1.) (2) (3) (4) (5) 18 (1) (2) (3) IP65IP65 2.83.0Nm (4) (5) (6) (7) (8) 0 (1) (1) (2) (3) (4) (1) (2) (3) (4) 19 (1) (2) (3) 10 1. OUT1OUT2 OUT1OUT2 OUT2 OUT2 / +/ ( 8. ) ( 5. ) ( 7-3) 2.ON-OFF OUT1OUT2 ( 3-2-3 ( 4. ) ) 20 3. ( ) ( 8. ( 11-1 ) ) (A) (A): P2240112 4.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

HRS100/150

20 18 Facility water temperature 32C 18 Facility water temperature 32C 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 Facility water temperature 40C 6 Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] 104 Thermo-chiller Standard Type HRS100/150 Series Pump Capacity

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

9.5 2 x 4.3 (Mounting holes) Manual override 60.3 37.2 8.3 48 M5 x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (

Angle Seat Valve /

It is calculated using the following formula. r Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] DP : Pressure difference [Pa] r : Density of fluid [kg/m3] (3) Formula of flow rate It is described by practical units. Also, the flow rate characteristics are shown in Graph (2).

IDX-OM-U021

) 51 1276 1375 () (1) 1,3 (2) (1) 1,3 () 20 335 7122 670 752 (3) (3) (2) IDF100150F 6-3 6 2 IDX-OM-U021 6 IDF125F-30K16K () (10,2m) ) (10 ( 4 () () JIS 65A 10K 4x (K16K) 2m) 20 4x JIS 65A 10K 25 25 (10,0.7m) 78 9351 267 18 8x19 4x19 A A A 140 1130 140 1120 655 K 18 K 75 K16K (17) 64 (K16K) 17) JIS 65A 10K JIS 65A 10K 40 51 1276 1418) (14~18) 1375 (1) () (1) 1,3 1,3

Solid State Auto Switches

Weight (g) D-Z73 D-Z76 D-Z80 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 7 31 50 10 55 7 31 Lead wire length D-Z73, Z80 D-Z76 Dimensions (mm) M2.5 x 4L Slotted set screw M2.5 x 4L 27.6 1.5 Slotted set screw 30.5 2.3 2.5 6.2 6.2 Indicator light D-Z80 without indicator light Indicator light DD5.7 5.5 2.7 Most sensitive position Most sensitive position 3.4 12.5 12.5 1641 Reed Auto Switch

ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 12.9 17.5 29.4 12 25.5 28.6 25.8 28.3 9.6 10 7.8 11.7 M5 X 0.8 8 25 22.2 6 ASD230F-M5-06 11.6 13.7 20.6 32.5 13 34.6 39.6 6 14 ASD330F-01-06S 11.6 13.7 22.9 29 38.5 36.1 31.1 14.2 11.8 10.6 R(PT)1/8 12 32.1 27.1 15.8 33.9 38.9 8 ASD330F-01-08S 15.2 18.5 28.2 31 44.8 6 ASD430F-02-06S 12.8 17 25.2 53 43.5 18 8 36.7 ASD430F-02-08S