Mist Separator Regulator Note There are two types of bodies, which are 12-2 and 12-3 described above according to the model. Please note that the applicable model cannot be changed by switching these two types of products.
VOptions HRR012/018 How to Order With Electric Conductivity Control Function, Applicable to DI Water Piping p. 32 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump Mounted p. 34 Air-cooled Refrigeration (Single-phase 100
11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SPL3 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 -27No.EX-OMV0023-A Dimensions If a fieldwireable connector is used for the power supply connection, and the SI unit is installed directly to a valve manifold, the cable connectors outer diameter should be 16
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.
(2-color) Grommet A79W 3-wire (NPN) F7NV F79 5 V,12 V IC circuit Grommet 3-wire (PNP) F7PV F7P F7BV J79 12 V 2-wire Connector J79C Relay, 24 V 3-wire (NPN) F7NWV F79W PLC 5 V,12 V IC circuit 3-wire (PNP) F7PW Diagnostic indicator (2-color) Grommet F7BWV J79W 12 V 2-wire F7BAV F7BA Water resistant (2-color) 4-wire (NPN) 5 V,12 V Diagnosis output (2-color) F79F IC circuit Lead wire
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
V 12 V V 12-2 12-1 1. 1 2 2. 3.
Cylinder Position of rotational axis: Parallel side b and through the center of gravity Position of rotational axis: Through the center of diameter and gravity 2 3 2 2 a r a I = m 12 I = m 12 3. Thin rectangular plate (Including 8.
Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6,Er7) System error (Er0, Er4, Er6 or Er7) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. The display shows "HHH". 7 (2) Supply a correct voltage of 12 to 24 VDC 10%.
VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)
x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering
(Position lock) Nabeya Bi-tech Kaisha (Clamp lock) Adjusting angle per 1 rotation of angle adjusting screw 5.7 4.8 MA12 x 26 PSL-K-12 CLH-12 x 18 MA14 x 28 PSL-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications. Precautions Backlash The rotary motion part has a structure that does not generate backlash.
VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33
to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90
Check that the power supply voltage is within the range of 12 to 24 VDC 10%. Supply the correct voltage of 12 to 24 VDC 10%. Incorrect power supply Power saving mode Check if the power saving mode is selected. Reset the function settings. Indicator turns off. 9 Check the power supply wiring.
Mounting, Operation P.12 1) Operating air P.12 2) Precaution on design P.12 3) Mounting P.14 4) Operating environment P.15 5) Piping P.16 6) Cushion P.17 7) Speed control P.18 8) Direction control P.19 4. Maintenance P.20 1) Inspection P.20 2) Overhaul P.21 3) Disassembly P.22 4) Assembly P.23 5) Expendable supplies P.24 6) Replacement procedure of seal P.25 7) Inspection P.26 5.
Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Y es Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication
KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .
ARM 31 16 01 5 G PVQ Body ported ARP Base mounted 33 16 01 5 G PVQ IR IRV Symbol Body / (Sub-plate) Seal material Valve type Seal Body 33 N.C. VEX1 Nil H C37 Stainless steel FKM Voltage SRH 5 6 24 VDC Thread type (with sub-plate) 12 VDC SRP Nil F N T Rc Electrical entry: Grommet G SRF NPT NPTF Orifice size ARX20 Port size Orifice dia.