4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

VNC

N.O. 5.7 5.5 2 VXA 1 4 VNC0 VNC02 10.4 10.2 50 VN 12 (P1) 10 (P2) Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

VND

Normally closed Normally open LVQ 0.7 12 (P1) 10 (P2) Pilot pressure should be within the range of A against the operating pressure.

Series HAW Water Cooled Aftercooler 1

40 41.5 39 40 42.5 200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 37.5 47 51 38 44.5 48 43 49 54 42 47 49.5 45 48.5 52 HAW22 17 HAW37 25 Maintenance 7000 8600 10 36 Caution HAW55 1.

Large blow and

The compatibility should be judged by the customer before adopting the product. 790 Vacuum Flow ZH--X185 Series RoHS How to Order B X185 ZH 20 Passage diameter Dust bag Nil D Without dust bag With dust bag (Supplied with product) Hose band attached mm Symbol Bracket Nil B Without bracket With bracket 10 20 30 40 13 21.6 30 42 SP ZCUK Specifications Warning Model ZH10-X185 ZH20-X185 ZH30-

VFR2000-OMM0001

No.VFR2000-OMM0001 5 VFR2000 / / / / -2,3 -4 -5 -5 -6 -6 -6 -7 -7 -7 -8 -9 -9 -9 -10 3 -10 -10,11 DIN / -11 -11 -12,13 -14,15 -1No.VFR2000-OMM0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines

Electro-Pneumatic Proportional Valve

June 5, 2002 Electro-Pneumatic Proportional Valve Electro-Pneumatic Proportional Valve Series PVQ High accuracy Repeatability: 3% or less Hysteresis: 10% or less Compact Compact body with 12mm width (PVQ10) realizes more spacesaving. Long life 20 million cycles or more (PVQ30) Low leakage Direct poppet construction enables low leakage, while deenergized.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VFR5000-OMN0001

10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

High Purity Fluoropolymer

10 39.5 51 55 133 48.5 10 36 Inch sizes H Applicable tubing O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

Series KP/KPQ/KPG

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 18 4 4 10.4 20.7 D1 10 L2 A D2 8 H 6 19.5 10 10 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 21.5 26 18 12 26.3 Applicable tubing 10 18.5 24 41 29 29.4 M L1 17 17 12 20.9 25 58 46 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 18 4 4 10.4 20.7 D1 10 L2 A D2 8 H 6 19.5 10 10 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 21.5 26 18 12 26.3 Applicable tubing 10 18.5 24 41 29 29.4 M L1 17 17 12 20.9 25 58 46 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 18 26 21.5 12 26.3 Applicable tubing 10 18.5 29 41 24 29.4 M L1 17 17 12 20.9 46 58 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

CM2

Description Material 25 32 40 NBR Rod seal HDU-8 HDU-10 HDU-12L HDU-14 !