10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?

10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)1 to 5 V ?

10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)0.6 to 5 V ?

10%, Ripple (p-p) 10% or less (With power supply polarity protection)40 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (With NPN output)2 V or less (With load current of 80 mA)2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note)Variable (0 or above) Note)0.6 to 5 V ?

Its' compact design allows for mounting from three sides.Multi-stage vacuum ejector , Nozzle diameter: 1.2mm , Supply/release valve combination , Variety of options available, VACUUM EJECTOR, VACUUM SERIES, ZL112 MULTI-STAGE VAC. EJECTOR, HH, ZL112 NOZZLE SIZE 1.2, 1.50434 lb

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

phase 200 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.26 kg55 dB(A)81.6 lbs (37 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

(with no condensation)1000 VAC for 1 minute between terminals and housing50 M7 or more (500 VDC measured via megohmmeter) between terminals and housingCE marking, UL (CSA), RoHSPPS, FKM, CPVCNon-grease25A285 g370 g

Heavy-duty ball joint pad (flat with rib) w/adapter, Later vacuum inlet direction, Pad diameter: 40, 50, 63, 80, 100, 125, Pad material: NBR, FKM, EPR, silicone rubber, urethane rubber, H/D BALL JOINT W/ BUFFER VAC PAD, VACUUM PAD, ZP, ZP2, ZP3

Ball joint, heavy duty bellows type pad with buffer, Vertical vacuum inlet direction, Pad diameter: 40, 50, 63, 80, 100, 125, Buffer stroke: 25, 50, 75, 100, H/D BALL JOINT W/ BUFFER VAC PAD, VACUUM PAD, ZP, ZP2, ZP3

Heavy-duty ball joint pad (flat with rib) w/adapter, Later vacuum inlet direction, Pad diameter: 40, 50, 63, 80, 100, 125, Pad material: NBR, FKM, EPR, silicone rubber, urethane rubber, H/D BALL JOINT W/ BUFFER VAC PAD, VACUUM PAD, ZP, ZP2, ZP3

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?