0.55

Rated voltage Pressure specifications Nil Standard (102 psi (0.7 MPa)) DC K High-pressure type (145 psi (1 MPa)) 5 6 24 VDC 12 VDC Coil specifications AC (50/60 Hz) Nil Standard 1 2 3 4 7 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC T With power saving circuit (DC only) T type is available with DC mode only.

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

2/3 Port Valve for Various

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 (1) 10 5 (2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

CLQ

65 70 75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x

REC

-9200-www.stevenengineering.com 10 35 100 100 + 100 (n 2) 35 + 30 (n 2) Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

CLQ

65 70 75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D

ZSE F/ISE

Option Part no. 1 Bracket A ZS-24-A With 2 pcs. of mounting screws 1 Bracket D ZS-24-D With 2 pcs. of mounting screws 1 Panel mount ZS-24-E 1 ZS-24-F Panel mount + Front protection cover 16-2-28 5 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Specifications ZSE50F (Compound pressure) 100 to 100 kPa 100 to 100 kPa 500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (

Clamp Cylinder Series CK1

D-X Individual -X 1333 Series CK1 CKGA80, 100 / CKPA80, 100 Series / With Magnetic Field Resistant Auto Switch (Rod Mounting Style) 3 Dimensions CKGA80 Built-in standard magnet type / with magnetic field resistant auto switch (D-P4DWS type) 60 35 54 + Stroke 60 Speed controller valve Top width across flats 3 Cushion valve Top width across flats 3 10 40 15 10 30 11 11 3 x Rc 3/8 3 x Rc 3/8

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Compact Cylinder

-100 M8 x 60L x 135L 60 135 15 CVQB405 x 65L M5 x 45L 65 45 20 10 x 70L x 50L 70 50 25 15 x 75L x 55L 75 55 30 20 x 80L x 60L 80 60 35 25 14.5 x 85L x 65L 85 65 40 30 x 90L x 70L 90 70 7.5 45 35 x 95L x 75L 95 75 50 40 x 100L x 80L 100 80 75 45 x 125L x 85L 125 85 -100 50 x 150L x 90L 150 90 75 x 115L 115 -100 x 140L 140 3 Series CVQ Allowable Kinetic Energy Rod End Allowable Lateral Load

Compact Cylinder with Lock Series CLQ

65 70 75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D

ZQ-OM01401

30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR)

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

IR1000/2000/3000

) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa)

7

60 Material: Cast iron Unit: mm Material: Cast iron Part no.

LEF-OM002xx

60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details