Vacuum

Flat with rib 1 0 12 29.9 46 80 91 1 . 7 1 5 12 29.9 46 57 80 9 1 3 1 . 8 1 8 t25 21.5n4 465 30.5 Deep type '5132" tube may be substituted lor 4mm (Check leakage) I t o IPR $enies ffitlr Buflen lnimen Pad Diameters s20 . a25. o32 Pad Diameters @4O. sso Flat type Deep typeZPB2SD only Deep typeIZPR4oD only ) Flat type. Flat with rib Flat type .

2/3 Port Valve for Various

Series VXR21/22/23 Dimensions Normally Closed: VXR210/220/230 Normally Open: VXR212/222/232 Grommet: G Port size Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 59 60 60 Port size P Rc N Q L K J H F E A B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80

9.8

k Max. 28 V, 80 mA Residual voltage 2 V or less Analog voltage output Output impedance approx. 1 k The FUNC terminal is connected when using the copy function.

PFxx-OMO0007CN

NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 5 L/pulse 5F.S. 3 7 OUT1ON OUT2ON DC1224 V10 () 150 mA 160 mA 170 mA -35No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 IP65 050 -2585 () 3585R.H.() 3F.S.(1535 )5F.S.(050 ) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC

LFE-OMY0008

mA OUT1 (OUT2)80 mA OUT2 20%F.S. 1 [F34] 1F.S.

A-HEC-OM-J004

Timemin. 65 Recirculating fluid temperature Cooling water 35 60 55 50 Cooling water 25 45 Cooling water 10 40 Ambient temperature25 Recirculating fluidGALDEN HT200 Recirculating fluid level180 (At recirculating fluid temp. 25) Cooling water flow rate3L/min Shut out from outside with a lid (styrofoam) 35 R 30 25 20 0 10 20 30 40 50 60 70 80 Timemin.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

IP8001 Series

position 80% input value setting (%) or (%) 90% position 90% input value setting (%) (%) or 100% position 100% input value (%) setting (%) Fig. 40-3 No.IP8S-OM09 55 (800) PID constant setting PID constant setting is possible.

SL5200

100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

Modular Type Regulators Series AR

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 39.5 43 75 90 46.5 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 464 SP093-001I Issued: Sep 2009 P.G.

Direct Operated

Also, add 60 g for VX31, 80 g for VX32 and VX33 respectively for bracket option. Refer to Glossary on page 31, for details on the max. operating pressure differential and the max. system pressure.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Modular Type Lubricators Series AL

How to Order AL800 AL 23 80 12 0 R AL900 Semi-standard R Flow direction: Right Left Body size Port size Semi-standard Lubricator 1 1S-1 1S-2 2 3 6 8 1000 cm3 tank 1000 cm3 tank with switch (Bottom limit ON) 1000 cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight dome) Metal bowl with level gauge Symbol 12 14 20 4 1 1 1 2 2 1 80 90 1 2 2 1 Thread

Clean Regulator/Fluororesin Type

Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80

Mounting: F (Front Flange), Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 20mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 3 pcs.

Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 20mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 3 pcs.

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75/50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: F (Front Flange), Bore Size: 40mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 50mm, Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector), Number: 3 pcs.