Dedicated Controller Series LC1 Uniaxial Type

to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position

Process Pump <Fluororesin Type> Series PA3000

0.3 150 0.4MPa 10 0.4MPa 0.3MPa SUP = 0.5MPa 0.3MPa 0.2 100 0.2MPa 0.3MPa 0.2MPa 5 50 0.1 0.2MPa 00 50 100 150 00 5 10 00 5 10 Air consumption (l/min [ANR]) Flow rate (l/min) Operating cycle (Hz) PAP3313-T13: Flow rate characteristics (2.5Hz)* PAP3313-T13: Flow rate characteristics (5Hz)* PAP3310-T13: Flow rate characteristics 0.4 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa)

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Hole diameter 5 9 Features 1 3 Port Direct Operated Poppet 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry Rated voltage 100VAC 50/60 Hz 200VAC 50/60 Hz 110VAC 50/60 Hz 220VAC 50/60 Hz 24VDC 12VDC 240VAC 50/60 Hz Other DO-DIN terminal (without connector) 1 2 3 G-grommet (lead wire length: 300mm) H-grommet (lead wire length: 600mm) D-DIN type

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

VT325

DC: Can be attached to Grommet, Conduit, Conduit terminal. 220 VAC, 50/60 Hz VG 3 8 03 5 6 24 VDC S T Conduit terminal Without connection port (For manifold) 00 12 VDC TL Terminal with indicator light VP 9 7 240 VAC, 50/60 Hz Other DLDIN terminal with indicator light S070 Option For the coil rated voltage (option ), please contact SMC.

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

VCB

TI/ TIL 0.54 4 0.8 13 1/4 (8A) 3/8(10A) 1/2(15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCB3 3 PA 0.80 5 0.5 19 3.0 1.4 7 0.2 33 PAX 2.1 10 0.1 50 0.35 3 3.0 8.4 PB 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 0.60 4 1.3 14 0.85 5 0.7 20 VCB4 3.0 4 1.4 7 0.3 33 2.1 10 0.12 50 Note 1) Refer to model selection on page 17-2-24 regarding port size and orifice size

MHT2

Bore size 32 mm 32 40 mm 40 50 mm 50 63 mm 63 Action Double acting D Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHT2

Note 50 63 32 40 Bore size (mm) Action Double acting Reed switch D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W Solid state switch D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F78AVL D-F79F Fluid Air 0.1 to 0.6 MPa Operating pressure Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut. 5 to 60C Ambient and fluid temperature 32, 40 50, 63 BQ-2 Lubrication Not required 3 to

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

V Relay, PLC 2-wire 5 V, 12 V 12 V IC circuit 100 V or less 24 V Connector IC circuit 5 V, 12 V Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

For Water Digital Flow Switch Series PFW

DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Caution Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Be sure to read this before handling the products.

PSxx-OMU0008CN

/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1

3 Port Solenoid Valve Rubber Seal Series SY100 1

For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

Ejector Valve Unit, Series ZYY/ZYX

Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.