Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Port size For sub-plate, manifold type 40, 41, 42, 43 Nil: Without sub-plate R port P, E port 3: Common exhaust type for main and pilot valve D: Push-turn locking slotted type R port P, E port (With gasket and screws) 01: 1/8 With sub-plate Electrical entry 24, 12, 6, 5, 3 VDC M8 connector 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24,12 VDC 100,110, 200, 220 VAC Grommet L plug connector M

Sine Rodless Cylinder Series REA

, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

SL5200

Specifications SL5201mmA Operating Parameters SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5206 1 to 60 psig (0.007 to 0.4 MPa) SL5210 1 to 100 psig (0.007 to 0.7 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 Silencers/Exhaust Cleaner Series AN/Series AMC Series Noise reduction Nominal filtration rating (Reference values) Oil mist removal ratio Standard type Low back pressure Compact and easy mounting Series AN00 100 m 150 m Page 5-10-2 30 dB (A) Compact type Space-saving compact type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

HRX-OM-R016

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Thermo-chiller Air-cooled 200 V Type Inverter Type (UL Standards) RoHS HRSH Series How to Order A 20 HRSH 250 Cooling capacity Option 100 10.5 kW 150 15.7 kW 200 20.5 kW 250 25 kW 300 28 kW Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note 1) With uid ll port S Note 2) Conforming to CE/UL standards Cooling method A Air-cooled

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

PFxx-OMU0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 120 L/min) value is below 240 L/min) value is below 480 L/min) 150 to 3150 L/min 300 to 6300 L/min 600 to 12600 L/min 5.0 0 to 5%F.S.

Pneumatic Purification

174 R134a 890 3 3/4 PDE260-S 1007 7.5 8.5 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 990 5 PDE310-S 1200 7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 1060 5 PDE410-S 1483 13.5 15.0 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1180 6 PDE510-S 1840 15.5 17.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1200 8.5 PDE610-S 2400 20.0 22.8

DOC1001322

Status (6): TEMP READY signal output continues since the temperature is now back within the Out Time range of 200 sec even though it was temporarily outside the Low range. Status (7): TEMP READY signal turns OFF when 200 sec has passed after the temperature rises above the High range.