AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -28- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including

SI unit for DeviceNet ®

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

VK3000

Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1

VK3000

.: 3.5 to 7 78.4 Max.10 74.1 70.9 Manual override (Non-locking) Pg7 2 x 4.5 (Mounting hole) n2 x Rc1/8 (A port) 11 2B 4A 2A 2B VV061 38 4A 2A 19 VV100 3 (Pitch) 2 x Rc1/8 2 x Rc1/8 V100 (P port) (P port) 2n1 x Rc 1/8 (A,Bport) (Lead wire length) S070 n1 = Number of VK3000 n2 = Number of VK300 ~ = 300 VQD VQD-V VK VK 2n x M5 x 0.8 (R1, R2 port) (Pitch) VT L Dimension n: Stations n L 1 38 27

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

VK300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n: Stations n L 20 396 388 19 377 369 18 358 350 17 339 331 16 320 312 15 301 293 14 282 274 13 263 255 12 244 236 11 225 217 10 206 198 9 187 179 8 168 160 7 149 141 6 130 122 5 111 103 4 92 84

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

Rotary Cylinder Series MRQ

Nil L Z N 0.5 m 3 m 5 m None (Example) A73C (Example) A73CL (Example) A73CZ (Example) A73CN Since other auto switches are available other than those listed above, refer to page 350 for details on other applicable auto switches. Auto switch is shipped together (not assembled).

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

BP1000

1 H 2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

VK300

O.D: 3.5 to 7 Max.10 69.8 83.4 75.9 2 x 4.5 (Mounting hole) Manual override (Non-locking) Pg7 300 (Lead wire length) 4 x Rc 1/8 (P, R port) 4 x Rc 1/8 (P, R port) 2 x 4.5 (Mounting hole) 39 23 8 (Pitch) 1.5 10.5 49.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n x Rc 1/8 (A port) L Dimension n L n: Stations 1 37 27 20 398 388 13 32 51 70 89 108 127 146 165

IP8001 Series

/oC or less Max output flow rate *5 80 L/min(ANR) or more (SUP=0.14MPa) 200 L/min(ANR) or more (SUP=0.4MPa) Air consumption *5 2 L/min(ANR) or less (SUP=0.14MPa) 4 L/min(ANR) or less (SUP=0.4MPa) -20oC80oC(Non Explosion,IS Explosion:T4/T5)6,7 Ambient temperature and operating fluid temperature -2060(IS Explosion:T6) Explosion protected construction (Option, preparing) *8 ATEX Intrinsic safety

Digital Gap Checker

min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 1 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided Repeatability 0.005 mm or less 0.010 mm or less 0.020

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

Series DXT474

L type connector w/ plug and 300 mm lead wire LO L type connector w/o plug and lead wire LN L type connector with plug and pins M M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

Siiiil"Tivrc

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Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Instantaneous flow: L/mincfm Accumulated flow: Lft3 Port size C8 02 8 (5/16") One-touch fitting Rc1/4 NPT1/4 G1/4 Note 4) N02 F02 Option 2 Note 4) ISO1179-1 compliant Made to Order With bracket (For without flow adjustment valve) S R Nil With bracket (For with straight type flow adjustment valve) Piping entry direction ZS-33-M ZS-33-MS With 3 selftapping screws Nil L With 2 selftapping screws

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating uid outlet, circulating