0.01

bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations 1 Left Right OUT 1 OUT 5 Stations L1 L2 L3 1 106

Multi-Axis Step Motor Controller

Screw mounting DIN rail mounting 139.2 5.5 mounting hole 117.1 125 105.2 116.2 106 2 104.3 11.9 2.9 2.5 144.2 2.9 2.9 81 5.5 mounting hole 66.3 136.2 144.2 125 DIN rail mounting bracket 10 JXC73/83/93 Series Controller Details Parallel I/O JXC73/83 No.

Series KV2 Fittings

KV2 Torque Specifications Thread NPT Standard Thread Torque (in-lbs) 1/8 62 to 80 1/4 106 to 124 3/8 195 to 212 1/2 248 to 266 3/4 248 to 266 Stud end into metallic ports Metallic: Aluminum, zinc, stainless steel, and brass 22 Series KV2 Important Information DOs DONTs 1 1 Tighten fitting by hand. Apply final torque with wrench at the hex.

Integrated Controller

900 14 6 900 880 950, 1000 16 7 1050 1030 23 314.9 359.9 6 130 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS40H (170) 6 H9 (+0.030 0 ) depth 7 106

Fluoropolymer Piping Equipment

106 64 46 16 16 LQ3H7B-M 1" 95.5 95.5 22 22 LQ3H7C-M 1 1/4" 93.3 93.3 28.5 28.5 LQ3H8C-M 1 1/2" 1 1/2" 101.3 39 60 114 77 55 36 36 24.5 22.5 24 64 62 29 22 1/2" 915 A LQ3 Series Dimensions Female connector: LQ3H-F Metric Size Port size Rc (NPT) Model Applicable tubing O.D.

HRS100/150

Page 106 uParticle Filter Set . Page 117 Recommended External Piping Flow . Page 108 iWired remote controller . Page 117-1 Cable Specifications . Page 108 Operation Display Panel . Page 109 Cooling Capacity Calculation List of Function . Page 109 Required Cooling Capacity Calculation . Page 118 Alarm . Page 109 Precautions on Cooling Capacity Calculation ...

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 3) Reference dimensions AS431F-04-11 104 16.2 21 49.4 25.8 32.6 57.1 18.5 3/8" 24 28.6 49.6 42.1 56.7 49.2 1/2 (23.8) AS431F-04-13 106 19.4 22 52 26.8 36.3 60.8 21.7 1/2" 489 Series AS Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and delivery.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 60.8 54.4 22 32.6 52 49.4 26.8 12 21.7 3/8" 17.9 25.8 105 19.4 104 21 16.2 NPT 1/2 56.7 49.2 49.6 42.1 29 23.8 AS431FG-N04-13 57.1 36.3 52 1/2" 21.7 26.8 106

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

0.5 3EB 1P 5EA 49.8 L plug connector with cover (LL) 52-SY9120-LL02 03 Insulation: Red (+) Insulation: Black () 4.1 16.7 14 0.3 mm2 L 148.3 (Lead wire length) Cable type (TT) 52-SY9120-TT02 03 Lead wire marking No.1 (+), No.2 () 0.75 mm2 L 165.1 (Lead wire length) Max.10 11 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 2-position double L plug connector (L) 52-SY9220-L02 03 106

Modular Type Lubricators Series AL

2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact point: 1a, 1b AW AG E AV AF B Clearance for maintenance 210 Clearance for maintenance G 1/2 Float switch Part number: IS400-1 to 2 210 Bracket mount With float switch Model P A B C Q V B AL30

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 60.8 54.4 22 32.6 52 49.4 26.8 12 21.7 3/8" 17.9 25.8 105 19.4 104 21 16.2 NPT 1/2 56.7 49.2 49.6 42.1 29 23.8 AS431FG-N04-13 57.1 36.3 52 1/2" 21.7 26.8 106

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 18.5 59 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 21 65 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 60.8 54.4 22 32.6 52 49.4 26.8 12 21.7 3/8" 17.9 25.8 105 19.4 21 104 16.2 NPT 1/2 56.7 49.2 42.1 49.6 29 23.8 AS431FG-N04-13 57.1 36.3 52 1/2" 21.7 26.8 22 106

C76

12.5 1 to 50 st 8 (33) 13 (38) 32 40 32 40 138 138.5 83 88 83.5 88.5 58 63 58.5 63.5 108 113 108.5 113.5 D-C7/C80 D-C73C/C80C NCA D-J79C 8.5 (33.5) D-A73 D-A80 13.5 (38.5) DD-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 84 59 9 (34) 8 109 -X 40 139 89 64 14 (39) 13 114 2032 40 32 40 136 81 86 82 87 56 61 57 62 6 (31) 11 (36) 7 (32) 12 (37) 5 10 6 11 106

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

Power Clamp Cylinder

Clamp Arm Tightening Torque Switch bracket kit Bore size (mm) Tightening torque Ibfin Nm 53 to 80 106 to 133 133 to 177 159 to 212 40 50 63 80 6 to 9 12 to 15 15 to 20 18 to 24 Stopper bolt kit Top cover kit 207

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

52 14 113 21 30 72 23 17 100 Up to 1500 20 to 1500 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 Bore size [mm] H1 J K KA LD LH LS LT LX LY LZ MM N P PG PH PL PW RT RY S X 40 8 M8 x 1.25 6 14 9 40 207 3.2 42 70 81 M14 x 1.5 27 1/4 42 11 20 45 153 27 50 11 M8 x 1.25 7 18 9 45 222 3.2 50 80 90 M18 x 1.5 30 3/8 46 10 21 50 30 76 168 27 63 11 M10 x 1.25 7 18 11.5 50 250 3.2 59 93 106

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

end) 2.5 (With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106

CP95

C95 CP95 NCM NCA DVD -X AM WH WH + Stroke L8 + Stroke H 20ZY + Stroke Data Bore size (mm) AM B D EE PL RT I12 KK SW G BG (MIN) L8 E R VD VA WA WB WH ZZ ZY I2 I9 M10 x 1.25 32 22 30 12 G 1/8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106

15

M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120 4.5 9 99 20.5 139 17.5 35 140 64 2 Note) The above figures show the product with