AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Vertical Mount) For transfer load of 5kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) 100 200 50 10 1 Positioning distance (mm) 100 150 50 10 1 Positioning distance (mm) 10 10 10 20 5 1 0.1 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 5.1 1.3 0.3 0.1 2.6 3.8 1.3 0.3 0.1 80 80 1.3 2.6 0.7 0.2 0.1 1.3 1.9 0.7 0.2 0.1 For transfer

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

IZT40/41/42

40 42 40 41 42 40 41 IZT40 IZT41 IZT42 Standard, AC type D 1 6H R F IZTB 40 16 Bar w q e r t y u i y Plug position q Model t One-touch fitting Symbol Model 40 Standard, AC type 42 Dual AC type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Refrigerated Air Dryer

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

rep-modular-e

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZX

B 22 46 Code q Code w Ejector exhaust type Weight Standard accessory Codes q and w are corresponding to the suffixes in How to Order to indicate the exhaust method.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6 [39.8] 47.4 [49.6] 39.1

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Compact Cylinder

Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Digital Flow Switch (Integrated display type) ( compatible)

^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting AC_E_G (Setting G of the accumulated