99

Use a commercially available belt wrench etc. for mounting and removing clamp rings. 68 High Precision Filter for Liquids FGH Series Dimensions FGD FGE FGG FGA FGC FGH100/200 FGH300 FGF FGH FGH 2 x Rc 2 x Rc M6 M6 FQ1 FN EB ES Pull-out dimension Pull-out dimension Dimensions A B Element length Port size (Rc) Model 3/8, 1/2 235 FGH100 70 x L117 211 3/4, 1 240 364 3/8, 1/2 FGH200 70 x L246

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Operating pressure Port size Rated flow rate Model Model/Rated Flow Rate Rated flow rate (L/min) Model Threaded connection Flange connection Port size Operating pressure Threaded connection Flange connection Threaded Rc Flange SSA Threaded Rc Flange SSA (L/min) FH340-03 FH340-04 FH342-06 FH342-08 FH340-10 FH340-12 FH540-03 FH540

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1/2 VEA 0.50 0.25 VY1 0.45 VBA VBAT 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point AP100 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

0.20 0.25 0.20 IC 0.15 ITVH 0.10 ITVX 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT Rc 1/2 0.50 0.25 AP100 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Bracket model no. 300 1,000 3,000 6,000 10,000 Exhaust of oil mist 3 8 3 4 1 2 1.7 1 2 1 A Drain cock (Standard) 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 0.7 AMC-EL6 BE60 1.2 AMC-EL8 D Drain piping AMC-EL9 Thread type Applicable to drain piping ANR: 20C atmospheric pressure, relative humidity 65% Nil N F Rc NPT G Model/Female Thread Type Model Specifications Effective area (mm2) AMC220 AMC320

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) For CE compliant models, DC-type only. 10 Clean series Thread type Copper/Fluorine/Silicone free + Low particle generation 21 Nil Rc Enclosure N NPT Nil Dust-protected T NPTF W Note 1) IP65 (Dust-tight, Water-jet-proof) F G Note 1) Valves are IP65 specifications. Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) For CE compliant models, DC-type only. 10 Clean series Thread type Copper/Fluorine/Silicone free + Low particle generation 21 Nil Rc Enclosure N NPT Nil Dust-protected T NPTF W Note 1) IP65 (Dust-tight, Water-jet-proof) F G Note 1) Valves are IP65 specifications. Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Thread type OUT (2) Rc NPT G Nil N F 1 (1) IN Port size Voltage Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Consult P/A regarding other voltages.

7ND9071en

Disconnect and remove all cabling which enters the limit switch housing (300). Remove screws (325), 3 pcs. and lift out the limit switch base plate (324) complete with switches, LUI and connector block. Open screw (326) and turn the limit switch housing (300) from the positioner housing. Remove the electronics cover (39). Proceed with the valve controller as applicable.

Air Slide Table Series MXQ

0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Air Catch Sensor

0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

3

VXD Electrical option Other option Oil-free/Port thread Special voltage/Electrical entry/Electrical option VXZ Symbol Oil-free Port thread Nil Rc A G B NPT D G E NPT Z Rc Specification Symbol Voltage Electrical entry 1A 48 VAC Grommet With surge voltage suppressor VXS VXS 1B 220 VAC 1C 240 VAC 1U 24 VAC 1F 48 VAC DIN terminal With surge voltage suppressor VXB VXE 1G 220 VAC 1H 240 VAC

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

HRX-OM-O021

Model number: HRS050-N-20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRS050-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.