Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

AZ1000

However under Japanese regulation, only MPa is available in Japan. 40 Specifications 1) Source pressure above 1000 psig (6.9 MPa) decreases maximum delivery pressure to less than 150 psig (1 MPa) due to supply pressure effect.

Support Guide/11-LEFG Series

(= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D

0.5

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Fieldbus system EtherCAT compatible SI Unit

(Refer to "Setting and adjustment (page 18)" for setting the switch.)

EXxx-OMW0014CN

. / SI 2 XD1/XD22 PROFINET XF1/XF2 /US1/US2SI US1 US2 1 IP65/ EX245-SPN1A SCRJ SCRJ SI XD1/XD2 EX245-SPN1A CLASS1 1 24 V(US1) 2 0 V(US1) 3 24 V(US2) 4 0 V(US2) 5 FE (XD1/XD2) .3-6 EX245-SPN1A/SPN2A (24 V) 1 0 V(US2) 2 0 V(US1) 3 FE 4 24 V(US1) 5 24 V(US2) 7/8 (5 ,) (XD1) 7/8 (5 ,) (XD2) . 3-7 EX245-SPN3A 7/8 (5 ) 18 No.EX-OMW0014CN-A PROFINET 1/2 1 TX 2 RX (XF1/XF2) . 3-8 EX245

XLGR Series

Guaranteed term and guaranteed range The warranty period is 2 million cycles (for size 80) or 1 million cycles (for size 100 and 160) (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

MH-OMY0004

Assy 18 3. 4. 5. 6.

PROFIBUS DP Compatible Fieldbus System

Contents Safety Instructions 3 Product Summary 8 System configuration 8 EX500 GW unit Model indication and How to order 9 Summary of Product parts 9 Mounting and Installation 10 Installation 10 Wiring 10 Setting 18 Specification 22 Specifications 22 Dimensions 24 SI unit Model indication and How to order 25 Summary of Product parts 26 Mounting and Installation 27 Installation 27 Setting 29

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

,

holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

VT307

For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.) Ambient and fluid temperature Response time 20 ms or less (at the pressure of 0.5 MPa) (1) Max. operating frequency 10 Hz Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

VT317

Refer to page 4-18-4.) Ambient and fluid temperature Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Max. operating frequency 10 Hz Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

VT325

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

Plug-in/Plug Lead: Single Unit

construction Air/Inert gas Fluid (3) 1.0 MPa Maximum operating pressure Plug-in unit Single 0.20 MPa 0.10 MPa Min. operating pressure Valve specifications Solenoid specifications Double 0.15 MPa 0.10 MPa 3 position 0.20 MPa 0.15 MPa 1.5 MPa Proof pressure (1) 5 to 50C Ambient and fluid temperatnre Not required Lubrication Push type/Locking type (Tool required) Option Manual override (2) 150

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Dimensions LLHAStations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A G D E C U Y W V N K H2 H1 B Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 67 19 65 19 5.5 M4 34 27 18 87 85.5 31 46.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 76 27.5 94.5 27.5 6.5 M5 47

PSE540/560

IS ZSM PF2 Pressure Sensor Controller IF Series PSE300 18 9.6 Data Response Time ms 20.8 Set Pressure Resolution Can be mounted in close proximity with each other either horizontally or vertically.