Information

L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

Compact Guide Cylinder

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

ZPT/ZPX

Calculation D n W P t : Pad diameter (mm) : Number of pads used : Lifting force (N) : Stable vacuum pressure (kPa) : Safety factor: Horizontal pad contact: 4 (dynamic) Vertical pad contact: 8 (dynamic) Pad W D = 3.14 x P x n x t x 1000 4 1 W Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

MGC

2 pcs. 1 pc. n pcs.

Auto Switch Guide

Indication Type P. 10-20-23 Band, Rail, Tie-rod Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 P. 10-20-26 Solid State Switches CE1 CE2 General Purpose Type P. 10-20-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 10-20-37 Direct Mounting 2-color Indication Type P. 10-20-42 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type with Diagnostic Output P. 10-20-

Auto Switch Guide

Type P. 6-16-24 Band, Rail, Tie-rod Mounting MB1 CA2 CS1 C76 C85 C95 P. 6-16-27 Solid State Switches CP95 NCM General Purpose Type P. 6-16-28 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 6-16-39 Direct Mounting 2-color Indication Type P. 6-16-40 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 6-16-46 Band, Rail, Tie-rod Mounting

Auto Switch Guide

Type P. 7-9-15 Band, Rail, Tie-rod Mounting MU D-X 20Data P. 7-9-16 Solid State Switches General Purpose Type P. 7-9-17 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 7-9-23 Direct Mounting 2-color Indication Type P. 7-9-25 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 7-9-29 Band, Rail, Tie-rod Mounting Water Resistant 2-color

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

Auto Switch Guide

Type P. 9-15-23 Band, Rail, Tie-rod Mounting CNS CLS CLQ MLGP RLQ MLU P. 9-15-26 Solid State Switches ML1C DGeneral Purpose Type P. 9-15-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 9-15-39 Direct Mounting 2-color Indication Type P. 9-15-42 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 9-15-50 Band, Rail, Tie-rod Mounting

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

Auto Switch Guide

Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 8-30-31 Direct Mounting 2-color Indication Type P. 8-30-33 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 8-30-39 Band, Rail, Tie-rod Mounting Water Resistant 2-

PFxx-OMX0007

peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 1 R Accumulated mantissa S16 N 0x0 to 0x270F (0 to 9) Accumulated mantissa x accumulated index = current accumulated flow 8040 0x1F68 2 R Accumulated index S16 N 0x0 to 0x0008 (0 to 8) -46No.PF-OMX0007-A 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

Transfer

Allowable load (N) Shock absorber ML2B40 Horizontal collision: P = 0.5 MPa 2. When the shock absorber is used within the air cushion stroke range, almost open the air cushion needle (about 1 turn from the fully closed position).

Regulator with Integral Pressure Gauge

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

energy saving effect

V: Power supply voltage Power consumption P: 20 [kW] Q = P = 20 [kW] P Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = 24 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)