OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

D20Port Connection port on 2 sides Port (Nominal size) 10 15 20 30 Auto switch Series Variations MHR2 P. 12-5-4 to P. 12-5-17 2 Finger MDHR2 Rotary actuated air gripper MHR3 P. 12-5-18 to P. 12-5-26 3 Finger MDHR3 12-5-3 4 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 Size: 10, 15, 20, 30 How to Order MHR 2 10 R Without auto switch With auto switch (Built-in magnet) MDHR 2 10 R M9N

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38

Mini Free Mount Cylinder

M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 3 Mini Free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of

E-ITV-STD-RF-A

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

IZx-OMX0087

IZTP43(-L) and IZTN43 (2pcs.), IZTP41(-L) and IZTB40 (2pcs.) Separate connection Example of connecting IZTC41(-L), IZTP43(-L) andIZTN43 Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (4pcs.) Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (2pcs.) , IZTP41(-L) and IZTB40 (2pcs.) 1-2.

Soft Start-up Valve

/4,1 3/4 128 113.6 59 53 37 37 64 53 Width across flats 36 Optional specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVL2000-02--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVL3000-03--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVL4000-04--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8

0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

MB1

P-83.5(YG)

Process Pump

PAB*-OMY0018 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5010 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 13 Working Principle P.14 Maintenance Parts P.14 Piping and Operation P.15 Dimensions P.16 1 Safety Instructions These safety instructions are intended

V

N350 1.213 ROTARY ACTUATORS VANE TYPE SERIES NCRB1BW D I M E N S I O N S W I T H S I D E P O R T S NCRB1_W_-_S R O TA R Y A C T U AT O R D I M E N S I O N S W I T H T O P P O R T S NCRB1_W_-_SE R O TA R Y A C T U AT O R R Q (Depth) Model D G J K L M N P F A B C E Q3 Q1 Q2 90O 180O 270O G2 Tolerance G1 Tolerances (Dimensions in Inches) 5-40UNC 0.14 10-32UNF M3 5/32 3/8 0.04 0.12 NCRB1_W10

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

ZR

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l /min (ANR)) ZL ZR1-W13L1 ZR1-W20L1 ZY Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) ZQ

Digital Flow Switch For Air/Water Series PF2A/PF2W

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Series H, DL, L, LL Self-align Fittings

Female union Plug P. 104 DHF Use to pipe from male threaded portion such as pressure gauge. P. 106 DP Use to plug unused fitting Branch tee P. 105 DT Use to branch line from female thread of both sides 90 direction. Swivel elbow P. 106 L Use to pipe at right angle to female thread portion. Swiveled at any direction.

NCM

K L M B A C (inch) Part no.

ITV-E

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic