99

High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more FGD FGE HEPO2element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) FGG FGA FGC Membrane element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) FGF FGH FGH FQ1 FN EB ES 61 High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more Prevents particle generation

Sine Rodless Cylinder Series REA

Model determination 2 Sine Rodless Cylinder Series REA Model Selection Method 2 Precautions on Design 1 Selection Method 40 32 25 500 500 300 200 300 400 Recommended driving force: Fn(N) 200 300 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable

XM, XY

Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87 114 Fn 95 110 Fd

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Basic Type/Direct Mount Type

Find the drive resisting force Fn (N) when moving the load horizontally. CY3B6 CY3B32 400 300 200 40 30 20 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 2.

Thermo-con

Model HEC001-W5A HEC001-W5B HEC003-W5A HEC003-W5B Cooling method Thermoelectric device (Thermo-module) Radiating method Water-cooled Control method Cooling/Heating automatic shift PID control 50 to 95F (10 to 35C), 35 to 80%RH (no condensation) Ambient temperature/humidity Circulating fluid Clear water, 20% ethylene glycol 50 to 140F (10 to 60C) (no condensation) Operating temp. range Circulating

Magnetically Coupled

Select the bore size from Lo and Fn based on data A .

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

XL-OMY0001

C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Industrial Filters

FGH FQ1 Replacement Parts and Seal List FN Parts Descriptions and Functions qHexagon head bolt No. Description Material Function EB ES wSeal 1 Hexagon head bolt Plug to release air in the housing Stainless steel or iron eNut 2 Seal Resin 3 Nut Tightens the cover.

Bag Filter FGF Series

FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model

Sine Rodless Cylinder Series REA/REB

Find the drive resisting force Fn (N) when moving the load horizontally. 10 15 2. Find the distance Lo (cm) from the point of the load where driving force is applied, to the center of the cylinder shaft. 50 40 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 30 40 30 20 3.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data (A).

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CY1

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data A . 10 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 Load Work piece 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R10 CY1R40 500 Fn Allowable driving force Fn (N) H 300 Allowable driving force Fn (N) 50 200 40 30 20 L Lo 100

Bag Filter

FGF3-40 1 unit FN EB ES Step 3 Selecting the filter model Selecting the filter model Checking each item Select vessel and seal materials based on compatibility with the fluid.