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Burst prssure Min. bending radius (mm) 10 15 20 27 35 10 15 23 27 35 20 to +60C (Water: 0 to 40C) (No freezing) Polyurethane Operating temperature Material Precautions How to Order Be sure to read before handling.

Related Products: Holder Series TMH 1

Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Vacuum Filter AFJ Series

[L/min (ANR)] 80 m 80 m AFJ20-02-80-S/AFJ30-03-80-S/AFJ40-04-80-S AFJ20-02-80-T/AFJ30-03-80-T/AFJ40-04-80-T 12 12 AFJ20-02-80-T AFJ30-03-80-T AFJ20-02-80-S AFJ30-03-80-S AFJ40-04-80-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500

MHx-OMM0057

MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01 AS1000AS2000 AS1001FAS2051F

AS_FS Inline

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

2% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

I

._ I 10, 22o, 12, 24, 48' 24ov sodoHz DC -24,6,12, 48, 100, 1 10v Voltag6 allowance 15.' + 10% of rated voltage lrcUlailon-Class B or equivalent Power consumptim AC Inrush-5.6VA(soHz)' 5.0VA(6OHZ) Hotdino-3.4VA(5OHz), 2.3VA(6OHz) DC_ 1.8W/2W (With LED) Indicator light Surg voltage supp(Gsor circuil AC ZNR (Varistor) ,Neon lamp (LED 10OV or le6s) DCDiode.

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

VFS4000-OMY0001

B VFS4 3 400 A A B B 1.25-3.5M1.25Y-3L1.25Y-3M COMCOMCOM COMVFS300040005000 AZ683-56A 20VFS4000500010 0.6Nm /01C COM AB VVFS2000-30A-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)

Vacuum Ejector with Solid State Timer

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Air-hydro Unit

The speed will be approximately 1.4 times the date given on page 10-17-3.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

Air cooled Thermo-con (Compact type)

INR-244-831 3-1 Communication Format 3.3 Composition of Required Message (from master to the product) Refer to page 3-4 3.5 Explanation of Code for codes 1 to 10.