Basic Type/Direct Mount Type

2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

I/O Configurator (NFC version)

Setting window (page 38) for details of parameters. -95No.EX-OMV0017-C (7) The parameter setting of the Wireless Base is complete.

MGG

Nickel plated Nickel plated C type snap ring for hole 15 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Refrigerated Thermo-chiller

20 30 40 Circulating fluid temperature (C) 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) HRZ002-W/008-W 9 HRZ008-W 8 Cooling capacity (kW) 7 6 5 4 HRZ002-W 3 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Heating Capacity HRZ001-L/002-L/004-L/008-L HRZ001-H/002-H/004-H/008-H 4 7 6 HRZ008-H HRZ004-H Heating capacity (kW) Heating capacity (kW) HRZ008

CE

d H B C D Part no.

CE

258-9200-www.stevenengineering.com 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4

JXCx-OMT0061CN

(3 ) BK RLS EMG C 24V Ry 24V M 24V 0V 0V (1) DC24V M24V EMG 2M24V(SETUP ON) (M24V) 3M24VBK RLS 25 - 7.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(b) Vcc B-1 Brown 12 5 5m GND A-1 Black 13 8 8m* A B-2 Red 7 A A-2 Black 6 A 10m* B B-3 Orange 9 B 15m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 C 20m* SD-(TX) A-4 Black 10 Black 3 * Produced upon receipt of (c) Signal name Terminal No.

Stability of suction position,

Suction Verification C.

Rotary Table/

C D Small sizes 1, 2, 3, and 7 are newly introduced to the series! Small sizes 1, 2, 3 and 7 are newly introduced to the series! 2 types of shock absorbers are available, for low energy and high energy.

LX

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

33

10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid

OMU0023

Function Description 1 N C Not connected 1 2 N C Not connected 3 SD + Connect + signal lead 1) 4 SD Connect signal lead 1) 5 N C Not connected 6 N C Not connected 8 CN3 7 N C Not connected 8 N C Not connected Note 1) Refer to the operation manual for the controller module to be connected before wiring. If the functions are indicated as A / B, connect the signals as + / -.

90

Note 7) Cannot be selected for vacuum pump system.

Integrated Controller

Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

VZ3000

Applicable connector: 26 pins MIL (Conforming to MIL-C-83503) (mm) Stations 4 5 94.5 76.5 12 234.5 216.5 L1 L2 3 77 59 112 94 6 129.5 111.5 7 147 129 8 164.5 146.5 9 182 164 10 199.5 181.5 11 217 199 Built-in One-touch fittings C4: MAX. 7 C6: MAX. 7.5 2n-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-27 For details about certified products conforming to international

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CE

d H B C D Part no.

VZ100/300/500

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306. Connector Assembly with Protective Cover Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector assembly with protective cover enhances dust protection.