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Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

VPA300/500/700 Series VPA700 Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2

4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

OUT1 [AP1 RUn] (A2L RUn 1 ) , P_1=A-(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 (

Description Ethernet UCMP Echo request (Ping command) received Orange LED is flashing PI 1 TX+ 1 2 Forced output mode is ON Orange LED is ON RX+ 2 No Link, No Activity (Port1) LED is OFF 3 4 3 TXLink, No Activity (Port1, 100 Mbps) Green LED is ON 4 RXL/A1 Link, Activity (Port1, 100 Mbps) Green LED is flashing Link, No Activity (Port1, 10 Mbps) Orange LED is ON Summary of Product parts CAUTION

CE1 Series/ 1. / 1 1.5 *3) *3)1 1 () 1. 2. 3. a. b. c. 4. a. b. c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3.

switches 32 40 B Through hole/ Double end tap common (standard) 32mm 40mm Number of auto switches Bore size 12 16 20 25 Port thread type 2 pcs. 1 pc.

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 VBA 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 VE VY1 26.1 3 R, NPT 1/8 13.6 18.3 G 26.1 PPA AL 14-4-13

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 Stroke [mm] 100 100 to to 1000 1000 Refer to the applicable stroke table. [UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply.

Body DIN rail mounting bracket Ring Positioning key (a) 2 (b) 1 Removing 1) Loosen the clamp screw of the end plate on both sides. 2) Lift side (a) of the manifold base and slide the end plate in the direction of 2 shown in the figure to remove. 2 Wiring Specifications Terminal no./Lead wire color Lead wire color Positioning key Pin no. Terminal no.

ID20 ID30 ID40 ID60 Model 80 155 330 780 20 37 85 195 100 192 415 975 Recycled air flow rate Note) (L/min (ANR) Outlet air flow rate (L/min (ANR) Inlet air flow rate (L/min (ANR) Port size (Nominal size B) Weight (kg) 1 4 1 2 1 2 3 4 7 8.5 18.5 25 Supply dry air with a low dew point below 30C. Compact and lightweight without heater and electric control board.

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

(R A) 2 1 (A P) Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38

21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8 42.1 56.7 49.2 56.7 49.2 49.6 24 49.6 42.1 24.5 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.

-1 manifold block assy, VF(S)100 SOL VALVE 3-PORT*** $23.90 Add to Quote Add To Cart Add to Cart SMC AXT625-10A-1-B manifold block, VF(S)100 SOL VALVE 3-PORT*** $32.53

Note 1) ISO 4414: Pneumatic fluid power -Recommendations for the application of equipment to transmission and control systems Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications.