Micro Mist Separator

Semi-standard: "-" Standard Port thread Part No. type Rc C2SF-C-D G Rc C2SF-D G NPT C2SF-C(Z)-D NPT C2SF(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

One-touch Fittings Series KQ2

D .

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Title not found

(metric) spaEleyonamanr'od Manifold D-sub Connector .

KG

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

-fl Seies

qn D N coreclor.

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Manifold Specifications

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

JXCx-OMT0061CN

(1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150 D LED RWr0,bit F (LRUN) *2 ON PLC RWw0,bit 2:ON Ry0B: RESET ON OFF PC/TB Ry0B: RESET ON PLC PLC PC/TB PC:TB: <> 1-192 E <> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

ZP3

B C D E Y q Pad dia.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

Pneumatic Transfer System Series MF

a maximum of 152mm. 6 Series MF Dimensions Curved Type 15 32 MF -45 (D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424